Roll-to-roll fabrication of large-scale polyorgansiloxane thin film with high flexibility and ultra-efficient atomic oxygen resistance  

作　　者：Yi LI Zhonghua LI Detian LI Yanchun HE Shengzhu CAO Hu WANG Hengjiao GAO Hanjun HU Ying HE Yuan WANG Jun ZHU 李毅;李中华;李得天;何延春;曹生珠;王虎;高恒蛟;胡汉军;贺颖;王媛;朱俊(Science and Technology on Vacuum Technology and Physical Laboratory,Lanzhou Institute of Physics,China Academy of Space Technology,Lanzhou 730000,People's Republic of China;School/Hospital of Stomatology School/Hospital of Stomatology Lanzhou University(Dental Hospital).Key Laboratory of Dental Maxillofacial Reconstruction and Biological Intelligence Manufacturing,Gansu Province,School of Stomatology,Lanzhou University,Lanzhou 730000,People's Republic of China;State Key Laboratory of Advanced Display Technology,Special Display and Imaging Technology Innovation Center of Anhui Province,Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices,Academy of Opto-Electric Technology,Hefei University of Technology,Hefei 230009,People's Republic of China)

机构地区：[1]Science and Technology on Vacuum Technology and Physical Laboratory,Lanzhou Institute of Physics,China Academy of Space Technology,Lanzhou 730000,People's Republic of China [2]School/Hospital of Stomatology School/Hospital of Stomatology Lanzhou University(Dental Hospital).Key Laboratory of Dental Maxillofacial Reconstruction and Biological Intelligence Manufacturing,Gansu Province,School of Stomatology,Lanzhou University,Lanzhou 730000,People's Republic of China [3]State Key Laboratory of Advanced Display Technology,Special Display and Imaging Technology Innovation Center of Anhui Province,Anhui Provincial Key Laboratory of Advanced Functional Materials and Devices,Academy of Opto-Electric Technology,Hefei University of Technology,Hefei 230009,People's Republic of China

出　　处：《Plasma Science and Technology》2022年第6期173-181,共9页等离子体科学和技术（英文版）

基　　金：financially supported by National Natural Science Foundation of China (No.U1937601);the Industrial Technology Development Program of China(No.JCKY 2020203B019).

摘　　要：One of the most widely used and well-established atomic oxygen(AO)protection solutions for low Earth orbit(LEO)satellites is the deposition of protective coatings on polymeric materials.However,manufacturing extensive expanses of these coating materials with good transparency,flexibility,smoothness,ultra-thinness,and exceptional AO resistance remains a critical issue.Herein,we successfully deposited a 400 nm thick polyorgansiloxane(SiO_(x)C_(y)H_(z))coating with high optical transparency and uniform good adherence on to a 1.2 m wide polyimide surface,by optimizing the distribution of hexamethyldisiloxane and oxygen as precursors in the roll-to-roll compatible plasmaenhanced chemical vapor deposition process.After AO irradiation with the fluence of 7.9×10^(20)atoms·cm^(–2),the erosion yield of the SiO_(x)C_(y)H_(z)-coated Kapton was less than 2.30×10^(–26)cm^3·atom^(–1),which was less than 0.77%of that of the Kapton.It indicates that the SiO_(x)C_(y)H_(z)coating can well prevent the erosion of Kapton by AO.In addition,it was also clarified that a SiO_(2) passivation layer was formed on the surface of the SiO_(x)C_(y)H_(z)coating during AO irradiation,which exhibited a‘self-reinforcing’defense mechanism.The entire preparation process of the SiO_(x)C_(y)H_(z)coating was highly efficient and low-cost,and it has shown great potential for applications in LEO.

关 键 词：plasma-enhanced chemical vapor deposition HEXAMETHYLDISILOXANE polyorganosiloxane thin film FLEXIBILITY atomic oxygen 

分 类 号：TB383.2[一般工业技术—材料科学与工程] O539[理学—等离子体物理]