阵列式柔性力敏传感器的平衡校准标定方法  

Equilibration and Calibration Method of Array Flexible Force Sensor

作　　者：王怀鹏 周旭[2] 姚志明[2,3] 杨先军 王鹏[2,3] 秦嘉深[1,2] WANG Huaipeng;ZHOU Xu;YAO Zhiming;YANG Xianjun;WANG Peng;QIN Jiashen(Institution of Physical Science and Information Technology,Anhui University,Hefei Anhui 230601,China;Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei Anhui 230031,China;Science Island Branch,Graduate School,University of Science and Technology of China,Hefei Anhui 230031,China)

机构地区：[1]安徽大学物质科学与信息技术研究院,安徽合肥230601 [2]中国科学院合肥物质科学研究院,安徽合肥230031 [3]中国科学技术大学研究生院科学岛分院,安徽合肥230031

出　　处：《传感技术学报》2022年第6期719-724,共6页Chinese Journal of Sensors and Actuators

基　　金：安徽省科技重大专项项目(2020b05050002);合肥市借转补项目(J2019G20);2020年度安医大二附院-中科院合肥智能机械研究所(MBLHJJ202004);安徽省重点研发计划项目(202004a05020018)。

摘　　要：阵列式柔性力敏传感器在国家安全、医疗健康、工业制造、人机交互等领域发挥着重要作用,但由于材料和制备工艺等因素,传感器存在误差。针对阵列式柔性力敏传感器的一致性问题和反馈值补偿问题,分析其产生的原因,提出并设计了气压型一体化标定台和相应的平衡校准标定方法。标定台使用气泵作为压力源,通过硅胶膜将压力传导至传感器;平衡校准标定方法首先使用基于Q值检验的离群值处理方法对传感器各敏感点进行平衡,然后引入LMBP算法进行校准。实验表明:R^(2)大于0.997,误差小于2.7%F.S,该标定方法实时性和准确性高,操作简单,具有很好的实用性。Array flexible force⁃sensitive sensors play an important role in national security,medical and health care,industrial manufacturing,human⁃computer interaction and other fields,but due to the influence of materials and preparation technology,the sensor has errors.The reasons for the consistency problem and the feedback value com⁃pensation problem of the array flexible force⁃sensitive sensor are analyzed,and the integrated calibration platform of air pressure type and the corresponding equilibration and calibration method are proposed and designed.An air pump is used as a pressure source for the calibration platform and the pressure is transmitted to the sensor through the silicone membrane.The outlier processing method based on Q test is used to balance the sensitive points of the sensor,and then LMBP algorithm is introduced to calibrate the sensitive points.Experimental results show that R^(2)is greater than 0.997 and the error is less than 2.7%F.S.The calibration method has high real⁃time performance,high accuracy,simple operation and good practicability.

关 键 词：阵列式柔性力敏传感器 反馈值补偿 平衡校准 离群值处理 LMBP 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP18[自动化与计算机技术—控制科学与工程]