真空全压力测量新技术  

New Technology of Vacuum Total Pressure Measurement

作　　者：李得天[1] 张虎忠[1] 葛金国 杨喆 习振华[1] 范栋 李刚[1] 成永军[1] LI Detian;ZHANG Huzhong;GE Jinguo;YANG Zhe;XI Zhenhua;FAN Dong;LI Gang;CHENG Yongjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2022年第4期375-391,共17页Vacuum and Cryogenics

基　　金：国家自然科学基金(62171208)。

摘　　要：真空测量是真空科学与技术的重要组成部分,在航空航天、半导体、核工业、加速器、新材料等领域具有重要应用价值。经过几个世纪的发展,从宏观力学效应到量子效应,真空测量原理不断创新发展。从大气压到极高真空范围,不同真空测量仪器分别覆盖了不同量程段的测量要求。较完整地梳理了真空测量原理的发展历程,并依据近年来高端真空装备快速发展对真空全压力测量的新需求,厘清了真空测量仪器逐步向高精度、微型化和智能化发展的趋势,综述了近十余年来真空全压力测量技术与仪器的发展现状,展望了真空全压力测量新技术的未来发展前景。Vacuum measurement technology is an important part of vacuum science and technology.It has important applications in aerospace,semiconductor,nuclear industry,accelerator,new materials and other fields.After several centuries of developments,from macromechanics effect to quantum effect,the principle of vacuum measurement is constantly innovated and developed.From atmospheric pressure to extremely high vacuum(XHV),different vacuum measuring instruments cover the various measuring ranges.In the paper,the evolution history of vacuum measurement principle is reviewed systematically.According to the demand of the high-end vacuum equipment for vacuum total pressure measurement in recent years,the remarkable trend of vacuum measurement instruments development towards high precision,miniaturization and intelligence is clarified.The latest development status of vacuum total pressure measurement technology and instruments for nearly a decade is summarized,and the future development of new vacuum total pressure measurement technology is prospected as well.

关 键 词：真空测量 真空全压力 高精度 微型化 智能化 

分 类 号：TB772[一般工业技术—真空技术]