圆筒型三极式碳纳米管阴极电离规计量学特性研究  

Study of Metrological Characteristics of Cylindrical Triode-type Ionization Gauge with a Carbon Nanotube Cathode

作　　者：王永军[1] 张建 WANG Yongjun;ZHANG Jian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]东南大学电子科学与工程学院,南京210096

出　　处：《真空与低温》2022年第4期420-424,共5页Vacuum and Cryogenics

基　　金：国家自然科学基金(61671226、61971133、61627850)。

摘　　要：利用丝网印刷法制备了一种碳纳米管场发射阴极,并将其用作圆筒型三极式电离规的电子源,研究了该电离规在空气氛围中的计量学特性。研究表明,在10^(-7)~10^(-4) Pa的压力范围内电离规离子电流和实验气体压力呈良好线性特征,测量下限比传统圆筒型三极式热阴极电离规低2个数量级;该规的功耗仅8.5 mW,灵敏度约0.047 Pa^(-1),极低的功耗使其在空间探测中具有潜在应用价值。A carbon nanotube field emission cathode was prepared by screen printing method,and it was used as the electron source of the cylindrical triode-type ionization gauge.The metrological characteristics of the developed ionization gauge in air atmosphere were investigated.It is shown that the ion current and experimental gas pressure of the developed ionization gauge shows good linearity in the range of 10^(-7)~10^(-4) Pa,and the lower limit of measurement of this gauge is two orders of magnitude lower than that of the conventional cylindrical triode-type hot cathode ionization gauge.In addition,the power consumption of the gauge is only 8.5 mW and the sensitivity is about 0.047 Pa^(-1).The extremely low power consumption of the currently developed ionization gauge makes it have obvious advantages in space applications.

关 键 词：电离规 碳纳米管 场发射阴极 真空计量 测量下限 

分 类 号：TB772.3[一般工业技术—真空技术]