小型双聚焦磁偏转质谱计研究  

Study on the Miniature Double-focusing Magnetic Sector Mass Spectrometer

作　　者：杨喆 李得天[1] 郭美如[1] 任正宜 李刚[2] 成永军[1] 孙雯君[1] YANG Zhe;LI Detain;GUO Meiru;REN Zhengyi;LI Gang;CHENG Yongjun;SUN Wenjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空与低温》2022年第4期470-476,共7页Vacuum and Cryogenics

基　　金：甘肃省自然科学基金(20JR10RA479)。

摘　　要：为了满足我国空间探测任务不断发展的需求,研制了具有Mattauch-Herzog结构的小型双聚焦质谱计。基于离子光学原理进行设计,利用离子光学透镜模拟软件SIMION8.1仿真,研究了离子初始状态等参数变化对最终焦平面成像结果的影响,优化了相关结构。研制的质谱计对H_(2)的半峰宽(FWHM)实际测试结果为0.0875 amu(绝对分辨率),小于指标要求的0.1 amu,表明仪器的分辨本领达到了设计要求。In order to meet needs of the development of space exploration missions in China,a miniature double-focusing mass spectrometer with Mattauch-Herzog structure was developed.The design is based on the principle of ion optics,the software SIMION8.1 is used for simulation,the effect of the initial state of ions and other parameters on the final focal plane imaging results is studied,and the structures are optimized.The developed mass spectrometer’s testing results show the width of H_(2) at 50%peak height(FWHM)is 0.0875 amu which is less than 0.1 amu,that is to say,the resolution capability of the instrument meets the design requirements.

关 键 词：小型质谱计 Mattauch-Herzog型 双聚焦 

分 类 号：TB774.3[一般工业技术—真空技术]