空间用小型飞行时间质谱计研制及性能评价  

Development and Performance Evaluation of Miniature Time-of-Flight Mass Spectrometer for Space Exploration

作　　者：任正宜 郭美如[1] 孙健 杨喆 耿建 成永军[1] 张虎忠[1] 习振华[1] 贾文杰 李刚[1] 王江伟 REN Zhengyi;GUO Meiru;SUN Jian;YANG Zhe;GENG Jian;CHENG Yongjun;ZHANG Huzhong;XI Zhenhua;JIAWenjie;LI Gang;WANG Jiangwei(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;Institute of Mass Spectrometer and Atmospheric Environment,Jinan University,Guangzhou 510632,China;Guangzhou Hexin Instrument CO.,LTD.,Guangzhou 510530,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]暨南大学大气环境与质谱技术研究所,广州510632 [3]广州禾信仪器股份有限公司,广州510530

出　　处：《真空与低温》2022年第4期477-483,共7页Vacuum and Cryogenics

基　　金：国家自然科学基金(41904166);甘肃省自然科学基金(20JR10RA479)。

摘　　要：质谱计是一种能够精细分析物质成分的科学仪器,在航天活动中起着越来越重要的作用。为了满足空间探测的需求,研制了小型飞行时间质谱计,并对其性能进行了评价。研制的飞行时间质谱计由电子轰击源、垂直引入反射式飞行时间质量分析器和电子学部分组成,体积为300 mm×200 mm×200 mm,质量为13.4 kg,功耗为25 W,分辨率优于359 FWHM,质量数范围为1~502 amu,对C_(4)H_(10)的检测限为1.3×10^(-5)(质量分数)。The mass spectrometer,which is a scientific instrument capable of finely analyzing the composition of materials,plays an increasingly important role in space activities.To meet the needs of space exploration,a miniature time-offlight mass spectrometer(TOF MS)has been developed and its performance has been evaluated.The designed TOF MS consists of the electron impact ionization ion source,the miniature reflection time of flight mass analyzer with orthogonal extraction and electronics.The volume is 300 mm×200 mm×200 mm,mass is 13.4 kg,power consumption is 25 W,the mass resolution is better than 359 FWHM,and the mass range is 1 to 502 amu,the limit of detection is 1.3×10^(-5)mass fraction for C_(4)H_(10).

关 键 词：小型飞行时间质谱计 空间探测 性能评价 

分 类 号：TB774[一般工业技术—真空技术]