芯片缓冲氧化物蚀刻废液制备氟化氢研究  

Study on Preparation of Hydrogen Fluoride from Oxide Etching Waste Liquid on Chip

作　　者：闻涛 刘心语 周贞锋 WEN Tao;LIU Xinyu;ZHOU Zhenfeng(Quzhou Dingsheng Chemical Technology Co.Ltd.,Quzhou,Zhejiang 324000;Hangzhou lanran Technology Co.Ltd.,Hangzhou 310000;不详)

机构地区：[1]衢州市鼎盛化工科技有限公司,浙江衢州324000 [2]杭州蓝然技术股份有限公司,杭州310000

出　　处：《化工生产与技术》2022年第4期7-9,45,I0002,共5页Chemical Production and Technology

摘　　要：为了将芯片制造行业中属于危废的缓冲氧化物蚀刻液(BOE)废液资源化利用,研究了双极膜电渗析法处理BOE废液的工艺方法。结果表明,在溶液氟化铵的质量分数12.9%的情况下,产质量浓度60 g/L的氢氟酸时,双极膜的酸室电流效率约为75%,相当于氟化氢产品的双极膜电耗约为4.3~4.5 MW·h/t;碱室电流效率约为68%,相当于氢氧化钾产品的双极膜电耗约为1.6~1.8 MW·h/t。实现了将BOE废液直接转化成具有经济效益的氢氟酸与对应的碱,其经济和环保效益显著。In order to reuse the buffer oxide etching solution(BOE)waste liquid belonging to hazardous waste in the chip manufacturing industry,the bipolar membrane electrodialysis process for the treatment of BOE waste liquid was studied.The results show that when the mass fraction of ammonium fluoride solution is 12.9%and the mass concentration of hydrofluoric acid is 60 g/L,the acid chamber current efficiency of the bipolar membrane is about 75%,which is equivalent to the power consumption of the bipolar membrane of the hydrogen fluoride product is about 4.3~4.5 MW·h/t.The current efficiency of alkaline chamber is about 68%,which is equivalent to the bipolar membrane power consumption of potassium hydroxide products about 1.6~1.8 MW·h/t.The BOE wastewater was directly converted into hydrofluoric acid and corresponding alkali with economic benefits,and its economic and environmental benefits were remarkable.

关 键 词：芯片制造废酸 BOE废液 双极膜电渗析法 

分 类 号：TQ124.3[化学工程—无机化工]