含氟聚合物在半导体行业中的应用  

Applications of Fluoropolymers in the Semiconductor Industry

作　　者：孟庆文[1] 余国军 黄军 路迪 程宇 MENG Qingwen;YU Guojun;HUANG Jun;LU Di;CHENG Yu(Zhejiang Juhua Co.Ltd.Fluoropolymer Division,Quzhou,Zhejiang 324000)

机构地区：[1]浙江巨化股份有限公司氟聚合物事业部,浙江衢州324000

出　　处：《化工生产与技术》2022年第4期17-19,29,I0003,共5页Chemical Production and Technology

摘　　要：介绍了含氟聚合物的基本分类和特性,叙述了含氟聚合物聚四氟乙烯、可熔性聚四氟乙烯、乙烯-四氟乙烯共聚物和全氟醚橡胶在半导体行业制造过程中的应用,展望了国内半导体行业发展及配套含氟聚合物产品的市场前景,目前国内半导体原材料自给率严重不足,特别是卡脖子高技术产品,如超净高纯试剂、高纯度氟聚合物、大硅片、电子特气、抛光液、光掩模板和光刻胶等为代表的关键材料均被国际大公司垄断。半导体产业链配套的上游氟聚合物行业国产替代空间巨大,市场前景可观。The basic classification and characteristics of fluorine-containing polymers were introduced.The applications of fluorinecontaining polymers,such as polytetrafluoroethylene(PTFE),meltable PTFE,ethylene-tetrafluoroethylene copolymer and perfluoroether rubber,in the manufacturing process of semiconductor industry were described.The development of domestic semiconductor industry and the market prospect of supporting fluorine-containing polymer products were prospected.At present,the self-sufficiency rate of domestic semiconductor raw materials was seriously insufficient,especially the key materials represented by neck high-tech products,such as ultra-clean and high-purity reagents,high-purity fluorine polymers,large silicon wafers,electronic special gas,polishing solution,photo mask and photoresist,were monopolized by large international companies.Upstream fluoropolymer industry of semiconductor industry chain has huge substitute space and considerable market prospect.

关 键 词：含氟聚合物 半导体 氟树脂 应用 

分 类 号：TQ325.4[化学工程—合成树脂塑料工业]