周期数n对(BSZT/BTO)_(n)薄膜微观结构和电学性能的影响  

Influence of the period n on the microstructure and electrical properties of(BSZT/BTO)_(n)thin films

作　　者：季航 胡睿[1] 余萍[2] JI Hang;HU Rui;YU Ping(Measurement and Testing Center of China Academy of Engineering Physics,Mianyang621000,Sichuan Province,China;School of Materials Science and Engineering,Sichuan University,Chengdu610041,China)

机构地区：[1]中国工程物理研究院计量测试中心,四川绵阳621000 [2]四川大学材料科学与工程学院,四川成都610041

出　　处：《电子元件与材料》2022年第7期673-679,共7页Electronic Components And Materials

摘　　要：为了提高单周期BSZT/BTO薄膜的性能,采用射频磁控溅射技术制备了(BSZT/BTO)_(n)(n=1,2,3,4)多周期异质结构薄膜。通过XRD、SEM和电学性能测试等手段探究周期数n对(BSZT/BTO)_(n)薄膜微观结构和电学性能的影响。结果表明,随着周期数n的增加,(BSZT/BTO)_(n)薄膜结晶性增强,介电常数增大,介电损耗减小。在1 MHz测试条件下,(BSZT/BTO)_(4)薄膜的介电常数为187,介电损耗仅为0.02,同时薄膜的铁电性略微增加,而漏电流密度降低到了1.16×10^(-5)A/cm^(2),这表明(BSZT/BTO)_(n)薄膜周期数增加能有效提高薄膜的微观结构和电学性能。除此之外,还对(BSZT/BTO)_(4)薄膜漏电流密度机制与温度和电场强度的关系进行了研究,从机理上说明了(BSZT/BTO)_(4)薄膜漏电流密度特性。To improve the performance of single-period BSZT/BTO films,(BSZT/BTO)_(n)(n=1,2,3,4)multi period heterostructure films were prepared by radio-frequency magnetron sputtering.The effect of period number n on the microstructure and electrical properties of(BSZT/BTO)_(n)thin films was investigated by XRD,SEM and electrical properties testing.The results show that the crystallinity of the(BSZT/BTO)_(n)film increases,the dielectric constant increases,and the dielectric loss decreases as the period number n increases.At 1 MHz,the dielectric constant of the(BSZT/BTO)4 film is 187 with dielectric loss of only 0.02,and the ferroelectricity of the film is slightly increased,and the leakage current density is reduced to 1.16×10^(-5) A/cm^(2).As a result,the increase of period n can effectively improve the structure and electrical properties of these films.In addition,the relationship among the leakage current density mechanism,temperature and electric field strength was also studied,and the leakage current density characteristics of the(BSZT/BTO)4 thin film were explained by the mechanism.

关 键 词：射频磁控溅射 多周期 (BSZT/BTO)n 漏电流密度 

分 类 号：TB383[一般工业技术—材料科学与工程]