基于表面等离激元超材料的红外热传感器研究  

Infrared thermal sensor based on surface plasmon metamaterial

作　　者：吴元庆[1] 李崎嫚 刘春梅[1] 王婷[1] WU Yuanqing;LI Qiman;LIU Chunmei;WANG Ting(School of Physical Science and Technology,Bohai University,Jinzhou121013,Liaoning Province,China)

机构地区：[1]渤海大学物理科学与技术学院,辽宁锦州121013

出　　处：《电子元件与材料》2022年第7期707-712,718,共7页Electronic Components And Materials

基　　金：国家自然科学基金(61575029);辽宁省高等学校创新人才支持计划项目(LR2017051)。

摘　　要：研究了基于表面等离激元超材料的红外非制冷热传感器,通过对超材料的理论分析,证明其对于红外探测器的吸收具有重要的促进作用,利用二维光栅结构作为等离激元的激发结构,降低传感器三维结构的加工难度。通过光栅参数的优化和模型的调整,使得模型在大气窗口波段内,尤其是3~5μm和8~14μm波长范围中具有更大的吸收效率,通过与原始结构进行对比,可知本文改进后的模型能够显著提高红外非制冷热传感器的吸收效率,使其具有更好的市场价值和应用前景。In this work,the research of infrared thermal sensor based on surface plasmon metamaterial was carried out.Through the theoretical analysis of metamaterial model indicates that the surface plasmon metamateria plays an important role in promoting the absorption of infrared detector.The two-dimensional grating structure was used as the excitation structure of the plasmon to reduce the processing difficulty of three-dimensional structure of the sensor.Through the optimization of grating parameters and the adjustment of the model,the infrared detector can work in the atmospheric window band,especially 3-5μm and 8-14μm.Compared with the original structure,the improved model can significantly improve the absorption efficiency of the infrared non cooling and heating sensor,so that it has better market value and application prospect.

关 键 词：表面等离激元 超材料 红外热传感器 光栅 

分 类 号：TN215[电子电信—物理电子学]