菲涅尔衍射及有限时域差分在光栅仿真中的应用研究  

Research of Fresnel Diffraction and Finite Difference Time Domain in Grating Simulation

作　　者：宫鹏 徐桂成 张斯特 刘震宇[1] GONG Peng;XU Guicheng;ZHANG Site;LIU Zhenyu(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130031)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130031

出　　处：《长春理工大学学报（自然科学版）》2022年第3期1-5,共5页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金面上项目(51675506);科技部国家重点研发计划(2018YFF01011503)。

摘　　要：基于衍射现象的高精度光栅是一种常用的光学元件。通过研究衍射尺度下的相位光栅,提出了一种结合菲涅尔衍射和有限时域差分的光栅仿真方法,来仿真光栅的菲涅尔衍射区域内的光场分布情况。在入射光栅处采用有限时域差分计算方法,得到高精度的光场分布,然后在光栅后的近场区域采用菲涅尔衍射计算接收屏处的光场分布。通过结合两种方法解决了介质过渡区域的计算和传播区域有限时域差分计算量大的问题。结果显示接收屏处产生了三个衍射峰。基于有限时域差分算法的特点,此方法同样适用于非规律性的光栅结构,对于非等距光栅以及有制造误差的光栅分析具有普适性。High-precision grating based on diffraction phenomena is a kind of commonly used optical element. By researching the phase grating of diffraction scale,a grating simulation method combining Fresnel diffraction and finite difference time domain method is proposed to simulate the light distribution in the Fresnel diffraction region of the grating. Finite difference time domain method is used at the incident grating to obtain a high-precision light distribution,then the Fresnel diffraction is used to calculate the light distribution at the receiving screen in the near-field area behind the grating. By combining the two methods,the problems of medium transition region calculation and large amount calculation of finite difference time domain method of propagation region are solved. The results show that three diffraction peaks are generated at the receiving screen. Based on the characteristics of the finite difference time domain method,this method is also suitable for irregular grating structures,and is universal for the analysis of non-equidistant gratings and gratings with manufacturing errors.

关 键 词：衍射光学 光栅仿真 菲涅尔衍射 有限时域差分 

分 类 号：O346.1[理学—固体力学]