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作 者:王建波 王润宇 张明恩 苏波泳 WANG Jianbo;WANG Runyu;ZHANG Ming'en;SU Boyong(Engineering Training Center,Nantong University,Nantong 226019,China;College of Mechanical Engineering,Nantong University,Nantong 226019,China)
机构地区:[1]南通大学工程训练中心,江苏南通226019 [2]南通大学机械工程学院,江苏南通226019
出 处:《热加工工艺》2022年第14期116-120,共5页Hot Working Technology
基 金:国家重点研发计划项目(2019YFB2005300,2019YFB2005305);南通市应用研究计划项目(JC2019060)。
摘 要:采用等离子增强磁控溅射(PEMS)技术在海工用钢E690表面沉积Ti N与Ti Al N涂层。采用划痕仪测量膜基结合力、X射线衍射仪(XRD)分析薄膜物相、摩擦磨损试验机测量摩擦系数、SEM观察磨痕形貌。结果表明:涂层Ti N具有强烈(111)择优取向,Ti Al N择优取向为(200)。Ti N、Ti Al N涂层的平均结合力为35.3、32.9 N;Ti N、Ti Al N涂层后E690钢的摩擦系数分别为0.19、0.11,与E690钢基体相比分别降低了29.6%、59.3%。E690钢试样的磨损机制主要为黏着磨损,涂层后以疲劳磨损为主。涂层后的E690钢具有更好的减摩性、耐磨性,其中沉积Ti Al N涂层的抗磨减摩效果更好。TiN and TiAlN films were prepared on the surface of marine steel E690 by plasma enhanced magnetron sputtering(PEMS). The film substrate bonding force was measured by scratch tester, the film phase was analyzed by X-ray diffractograph(XRD), the friction coefficient was measured by friction and wear tester, and the wear morphology was observed by SEM. The results show that TiN has a strong(111) while TiAlN has a strong(200) preferred orientation. The bindi ng force between coating and metal base is 35.3 N and 32.9 N. After coating with TiN and TiAlN, the friction coefficients of E690 steel are 0.19 and 0.11, which are 29.6% and 59.3% lower than those of E690 steel substrate, respectively. The wear mechanism of E690 steel sample is mainly adhesive wear and fatigue wear after coating. The coated E690 steel has better anti-friction and wear resistance, among them, the deposition of TiAlN coating antifriction reduction effect is better.
关 键 词:等离子增强磁控溅射 TIN TIALN E690钢 摩擦磨损
分 类 号:TG174.444[金属学及工艺—金属表面处理]
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