基于标准漏孔比对法的漏率测量装置  

Leak Rate Measurement Device Based on Standard Leak Comparison Method

作　　者：王魁波 罗艳 吴晓斌 WANG Kuibo;LUO Yan;WU Xiaobin(Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《真空科学与技术学报》2022年第7期491-496,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(62071464)。

摘　　要：针对真空密封件的密封性能评估,采用了基于标准漏孔比对的漏率测量方法,具体包括动态比对法和静态累积比对法,通过四极质谱仪比较标准漏孔和密封件流出气体产生的离子流,利用标准漏孔的已知漏率和四极质谱离子响应的线性外推,计算密封件的漏率。研制了一套密封件的漏率测量装置,装置极限真空可达10^(-7)Pa量级,漏率测量范围为:10^(-7)-10^(-14)Pa·m~3/s,可用于具有检漏接口的各类密封件的漏率测试。采用该装置的两种方法分别进行不锈钢刀口密封件的漏率测试。结果表明:动态比对法对该不锈钢刀口密封件的漏率测试误差较大,低于10^(-11)Pa·m~3/s量级的极低漏率密封件更适合采用静态累积比对法进行测试。For the evaluation of the sealing performance of vacuum shells,a comparison method of leak rate based on the standard leak is proposed,which specifically includes the dynamic comparison method and the static cumulative comparison method.The ion currents generated by the outflowing gas of the standard leak and the sealed shell are compared by a quadrupole mass spectrometer (QMS).Using the known leak rate of the standard leak and the linear extrapolation of the ion response by the QMS,the shell’s leak rate is calculated.A device for measuring the leak rate of the seal is developed,which has a limit vacuum pressure down to 10^(-7)Pa,a leak rate measurement range of 10^(-7)-10^(-14)Pa·m~3/s.It can be used for leak rate testing of various seals with detection interfaces.The leak rate of a stainless steel knife-edge seal was measured by the two methods.It is indicated that the dynamic comparison method has a large test error for this sample,and it is advised that the sealed shell with an extremely low leak rate,such as lower than 10^(-11)Pa·m~3/s,is more suitable to be tested by the static cumulative comparison method.

关 键 词：漏率测量 比对法 标准漏孔 四极质谱仪 

分 类 号：TB74[一般工业技术—材料科学与工程]