有限元法提取寄生参数的宏敏感度模型  

Macro sensitivity model for parasitic extraction based on finite element method

作　　者：张程 徐小宇[1] ZHANG Cheng;XU Xiaoyu(Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049

出　　处：《电子设计工程》2022年第16期6-9,16,共5页Electronic Design Engineering

基　　金：国家重点研发计划(2017YFB0203500);国家自然科学基金项目(61574167)。

摘　　要：宏模型广泛地应用于集成电路寄生参数提取过程之中,它不仅能够有效减少计算复杂度,还能在保证计算精度的前提下加密敏感电路或器件结构。当前的集成电路特征尺寸已处于纳米量级,工艺波动所引入的导体尺寸变异对电路性能的影响不可忽略,为了解决这个问题,提出了一种宏模型的敏感度模型,即宏敏感度模型。基于有限元法框架,通过计算静电场总体刚度矩阵对工艺参数的导数完成对宏敏感度模型的构建,算例验证表明,宏敏感度模型能够分析集成电路的敏感度,从而提高利用宏模型提取参数的可靠性及电路设计的稳定性。Macro model is widely used in parasitic extraction in integrated circuits. It helps to reduce computation complications,and recently used to encrypt sensitive structures without losing accuracy remarkably. Since the current feature size of integrated circuits is on the nanometer scale,the influence of conductor size variation caused by process fluctuation on circuit performance cannot be ignored. The sensitivity model of macro model,the so-called macro sensitivity model,is proposed to guide the robust design and guarantee the reliability of parasitic extraction. The computation formulations of proposed sensitivity model are derived by computing the first derivative of global stiffness matrix with respect to the process parameters under the framework of the finite element method. The example shows that the macro sensitivity model can analyze the sensitivity of integrated circuits,so as to improve the reliability of the parameter extraction and the stability of the circuit design.

关 键 词：寄生参数提取 有限元法 宏模型 敏感度模型 集成电路 

分 类 号：TN402[电子电信—微电子学与固体电子学]