短脉冲光纤激光诱导等离子体辅助加工薄盖玻片研究  

Study on Thin Coverslip by Laser Induced Plasma Assisted Ablation with Short-pulse Laser

作　　者：卢希钊[1,2] 颜丙功 江开勇[1,3] LU Xizhao;YAN Binggong;JIANG Kaiyong(School of Electromechanical and Automation,Huaqiao University,Xiamen 361021;Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005;Fujian Provincial Key Laboratory of Special Energy Field Manufacturing,Xiamen 361021)

机构地区：[1]华侨大学机电及自动化学院,福建厦门361021 [2]厦门大学机电工程系,福建厦门361005 [3]福建省特种能场制造重点实验室,福建厦门361021

出　　处：《电加工与模具》2022年第4期53-56,共4页Electromachining & Mould

基　　金：福建省自然科学面上基金项目(2019J01059)。

摘　　要：薄盖玻片由于强度低、透明度好、光学性能影响小的优点在图像、光电、生物等传感器中大量应用,激光诱导等离子体辅助加工技术因能对薄透材质有效间接加工成为了一种新选择。基于激光诱导等离子体辅助加工技术加工薄盖玻片的机理,研究了激光能量密度、扫描速度、加工距离等参数对加工效果的影响规律,为下一代薄透介质的研究应用提供参考。Thin coverslips are widely used in image,photoelectric,biological and other sensors due to the advantages of low strength,good transparency and little influence on optical properties,and laser induced plasma assisted ablation has become an efficient indirect processing method on thin transparent materials.Based on the mechanism of laser induced plasma assisted ablation technology to machine thin coverslips,the influence of laser energy density,scanning speed,machining distance and other parameters on the effect was studied,which could provide a reference for the research and application of the next generation of thin transparent media.

关 键 词：激光诱导等离子体辅助加工 薄盖玻片 能量密度 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]