石英微壳体振动陀螺频率裂解调谐仿真分析  

Simulation analysis of frequency split tuning of silica micro-shell vibrating gyroscope

作　　者：林星 胡友旺 李靖轩[1,2] 于亚龙 孙小燕 LIN Xing;HU Youwang;LI Jingxuan;YU Yalong;SUN Xiaoyan(State Key Laboratory of High Performance and Complex Manufacturing,Changsha 410083,China;College of Mechanical and Electrical Engineering,Central South University,Changsha 410083,China)

机构地区：[1]高性能复杂制造国家重点实验室,湖南长沙410083 [2]中南大学机电工程学院,湖南长沙410083

出　　处：《传感器与微系统》2022年第8期11-15,共5页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2018YFB1107803);国家自然科学基金面上资助项目(51875585,51875584);国家自然科学基金重点资助项目(51935013)。

摘　　要：频率裂解是影响微壳体振动陀螺综合性能的关键指标。对于石英微壳体振动陀螺而言,其尺寸小,可加工区域受限,频率裂解的降低需要在关键位置上进行高效率的微质量去除。利用有限元仿真,在沿微陀螺工作模态轴径向,分析不同位置打微孔对于频率裂解的影响规律。仿真结果表明:调谐效率由外到内,先减小再增大,当调谐孔中线位于T型块与壳体连接处时,调谐效率达到最小值。根据规律,提出不同方位的粗、精结合的调谐策略,并且利用仿真验证调谐方式的正确性,将频率裂解降低至0.0035 Hz,为提高精密调谐的效率提供了指导。Frequency split is a key indicator that affects the overall performance of the micro-shell vibrating gyroscope.The fused silica micro-shell vibrating gyroscope size is small and the processable area of it is limited.The reduction of frequency split requires high-efficiency micro-mass removal at key points.Finite element simulation is used to analyze on influence of micro-holes at different positions on frequency split along the radial direction of the micro-gyro working mode axis.The result shows that the efficiency of frequency tuning decreases first and then increases from outside to inside.When the center line of the micro-hole is at the junction of the T-shaped block and the shell,the frequency tuning efficiency reaches a minimum.According to the law,a combination of coarse and fine tuning strategies in different azimuths is proposed,and the correctness of the tuning method is verified by simulation,and the frequency split is reduced to 0.0035 Hz,which provides guidance for improving the efficiency of precision tuning.

关 键 词：工作模态轴 微孔 频率裂解 调谐效率 仿真分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]