微流体惯性开关用液态金属的精密操控与封装  

Precise control and encapsulation of liquid metal for micro-fluidic inertial switch

作　　者：刘瑞 商二威 谢晋 刘禹 熊壮[2] 唐彬[2] LIU Rui;SHANG Erwei;XIE Jin;LIU Yu;XIONG Zhuang;TANG Bin(School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China;Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区：[1]江南大学机械工程学院,江苏无锡214122 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《传感器与微系统》2022年第8期25-28,共4页Transducer and Microsystem Technologies

基　　金：中国工程物理研究院超精密重点实验室项目(ZM18006);国家自然科学基金资助项目(51875253)。

摘　　要：选择无毒的镓铟锡作为液态金属汞的替代品,研究微流体惯性开关的封装工艺。经酸性处理与搭建无氧试验环境,抑制镓铟锡氧化,提高液滴的流动性能。通过解析计算,为保证液滴体积偏差对于阈值的误差影响小于1%,需实现体积为0.1μL×(1±3.9%)导电液滴的精密操控。针对金属液滴摄入不精确、不稳定的问题,搭建撞针阀系统,通过对撞针行程、输入压力及开阀时间的调控,完成目标体积的精确摄入(误差范围±3%),实现体积偏差对于阈值的影响误差为0.75%。并结合直书写3D打印涂胶的方法,最终完成液态金属的精密操控与封装。Galinstan which chosen as an alternative to mercury is used to study the packaging technology of microfluidic inertia switch.The oxidation of Galinstan is inhibited by acid solution cleaning and oxygen-free experimental environment,and the conductive droplet flow performance is improved.In order to ensure that the influence of the droplet volume deviation on the threshold error is less than 1%,the minimum droplet volume that can be accurately injected is 0.1μL×(1±3.9%).Aiming at the problem of inaccuracy and instability of injecting metal liquid droplet,needle valve system is set up.The precision control of the target volume is achieved by adjusting the stroke of needle,input pressure and open time of needle,error range of±3%,the influence error of the volume deviation on the threshold value is realized to be 0.75%.Combined with spreading the glue by direct ink writing 3D printing,precision control and packaging of the liquid metal is finally completed.

关 键 词：惯性开关 微流体 液态镓铟锡 精密操控 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH706[自动化与计算机技术—控制科学与工程]