冷阴极X射线管关键部件的设计与仿真  

Design and Simulation of Critical Components of Cold Cathode X-Ray Tubes

作　　者：张扬 李振军[1,3] 李元勋 李驰 赵立业[2] 戴庆[1] ZHANG Yang;LI Zhen-jun;LI Yuan-xun;LI Chi;ZHAO Li-ye;DAI Qing(National Center for Nanoscience and Technology,CAS Key Laboratory of Nanophotonic Materials and Devices(preparatory),Beijing100190,China;School of Instrument Science and Engineering,Southeast University,Nanjing210096,China;GBA Research Innovation Institute for Nanotechnology,Guangzhou510700,China)

机构地区：[1]国家纳米科学中心中科院纳米光子材料与器件重点实验室(筹),北京100190 [2]东南大学仪器科学与工程学院,江苏南京210096 [3]广东粤港澳大湾区国家纳米科技创新研究院,广东广州510700

出　　处：《真空电子技术》2022年第4期36-42,共7页Vacuum Electronics

基　　金：国家重点研发计划纳米科技重点专项(2016YFA0202000);国家自然科学基金面上项目(52072084,51972072);广东省重点领域研发计划项目(2020B0101020002);广东粤港澳大湾区国家纳米科技创新研究院自主立项项目(2020GN0106);北京市高校“实培计划”项目(22150121003/050)。

摘　　要：利用CST粒子工作室软件设计仿真了一种高电子通过率冷阴极微焦点X射线管。重点分析X射线管阴极结构、栅网和聚焦极的结构与电压、阳极电压等关键因素对电子束聚焦束斑的影响,特别是设计了一种独特的阴极凹槽结构,使阴极电子束发射的散角减小了21.84°,并使电子枪通过率从54.3%增加至74.59%。在此基础上设计的碳纳米管X射线管在阳极电压为70kV时,电子通过率可达到75%,电子束焦点约为56μm,聚束比为5:1,可为冷阴极微焦点X射线管的设计和加工提供参考。A kind of cold cathode microfocus X-ray tube with high electron transmission efficiency is designed and simulated by CST Particle Studio software. The influences of the cathode structure, the structures and voltages of grid and focusing electrode, the anode voltage and other key factors on focus spot of cold cathode X-ray tube are analyzed. A novel structure of cathode groove was designed to reduce the divergence angle of electron beam emission by 21.84° and increase the electron transmission efficiency from 54.03% to 74.59%. On this basis, an ideal cold cathode X-ray tube is designed, of which the anode voltage is 70 kV, the electron transmission efficiency is 75%, the focusing ratio is 5∶1 and the focal spot size is about 56 μm. The results can provide reference for the design and fabrication of cold cathode X-ray tubes.

关 键 词：冷阴极X射线管 场致发射 CST仿真 通过率 

分 类 号：TN14[电子电信—物理电子学]