Surface plasmons interference nanogratings:wafer-scale laser direct structuring in seconds  

作　　者：liao Geng Wei Yan Liping Shi Min Qiu 

机构地区：[1]Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,18 Shilongshan Road,Hangzhou 310024 Zhejiang Province,China [2]Institute of Advanced Technology,Westlake Institute for Advanced Study,18 Shilongshan Road,Hangzhou 310024 Zhejiang Province,China

出　　处：《Light(Science & Applications)》2022年第7期1607-1614,共8页光（科学与应用)（英文版）

基　　金：supported by the National Key Research and Development Program of China(2017YF A0205700);the National Natural Science Foundation of China(No.61927820,No.12004314,No 62105269);supported by Zhejiang Province Selected Funding for Postdoctoral Research Projects(ZJ2021044);China Potdoctoral Scence Foundation(2021M702916);supported by the open projet program of Wuhan National Laboratory for optoelectronics No.2020WNLOKF004;Zhejiang Provinial Natural Science Foundation of China under Grant No.Q21A040010.

摘　　要：It is always a great challenge to bridge the nano-and macro-worlds in nanoscience,for instance,manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days.Here,we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale,highly regular nanogratings on semiconductor-on-metal thin films.Our technique takes advantage of long-range surface plasmons-laser interference,which is regulated by a self-initiated seed.By controlling the scanning speed,two types of nanogratings are readily manufactured,which are produced by either oxidation or ablation.We achieve a record manufacturing speed(>1 cm^(2)s^(-1)),with tunable periodicity of∧<1μm.The fractional variation of their periodicity is evaluated to be as low as△∧/∧≈0.5%.Furthermore,by utilizing the semiconductor-on-metal film-endowed interference effects,an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing.As the fabricated nanogratings exhibit multi-functionality,we exemplify their practical applications in highly sensitive refractive index sensing,vivid structural colors,and durable superhydrophilicity.

关 键 词：utilizing WAFER refractive 

分 类 号：O53[理学—等离子体物理] TN24[理学—物理]