用于100 Gb/s光通信系统的p区倒置型APD的研究  

Avalanche Photodiode with p-down Structure for 100 Gb/s Optical Communication System

作　　者：廖卓冬 李珂[1] 刘浩冉 段晓峰[1] 黄永清[1] 刘凯[1] Liao Zhuodong;Li Ke;Liu Haoran;Duan Xiaofeng;Huang Yongqing;Liu Kai(State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876,China)

机构地区：[1]北京邮电大学信息光子学与光通信国家重点实验室,北京100876

出　　处：《中国激光》2022年第13期84-90,共7页Chinese Journal of Lasers

基　　金：国家重点研发课题(2018YFB2200803)。

摘　　要：光通信系统不断提升的传输速率对光电探测器的带宽提出了更高的要求。利用有限元分析软件APSYS对p区倒置型雪崩光电探测器(APD)进行设计与优化。结果表明,双台面p区倒置型APD可将电场限制在中心区域,避免器件发生边缘击穿,器件的暗电流约为0.1 nA,最大带宽为23 GHz,增益带宽积为276 GHz。在此结构上,对双台面p区倒置型APD的台面及层结构参数进行优化,得到最大带宽为31.7 GHz,增益带宽积为289.4 GHz的三台面p区倒置型APD。Objective The rapid development and widespread application of new broadband services such as cloud computing,big data,and mobile internet have led to an explosive growth in data center traffic.Due to the limitations of traditional electrical interconnects,it is difficult to meet the data transmission requirements of the current data centers,and optical interconnect technology has become the main solution for data transmission issues in data centers.In recent years,the trend in the increase of data center traffic and bandwidth is driving the upgrade of optical modules in data centers,and the demand for optical modules is growing at an accelerated rate.As the core component of the optical module,photodetectors play a key role in converting the transmitted optical signals into electrical signals.In this context,the demand for photodetectors in data centers is growing.Avalanche photodiodes(APD)are one of the photodetectors frequently used in optical modules,which have internal gain and can provide higher receiver sensitivity and dynamic range,and are receiving more and more attention from scholars.As data transmission rates move toward 100 Gb/s and 400 Gb/s,single-channel transmission rates increase to 25 Gb/s and beyond,placing higher demands on the bandwidth of photodetectors.APD can play a vital role in high-speed optical interconnection modules for data centers;therefore,it is of great importance to study APD with high bandwidth and high quantum efficiency.Methods We use APSYS software to design and optimize the avalanche photodiode with a p-down structure(p-down APD).APSYS is a finite element analysis software that calculates the optical and electrical properties of semiconductor devices by self-consistently solving Poisson’s equation,the carrier continuity equation,and the current density equation with various physical models.The transport mechanism of carriers inside the APD is very complex,and the accuracy and reliability of the results will be affected by the proper choice of physical model.In our simulati

关 键 词：光通信 光电探测器 p区倒置型雪崩光电探测器 台面结构 增益带宽积 

分 类 号：O436[机械工程—光学工程]