基于宏观傅里叶叠层成像技术的光学传递函数测量  

Optical Transfer Function Measurement Based on Macroscopic Fourier Ptychography

作　　者：浦东 何小亮[1,2,4] 戈亚萍 刘诚 朱健强[1,2] Pu Dong;He Xiaoliang;Ge Yaping;Liu Cheng;Zhu Jianqiang(Joint Laboratory on High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Joint Laboratory on High Power Laser and Physics,China Academy of Engineering Physics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;School of Science,Jiangnan University,Wuxi 214122,Jiangsu,China)

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海201800 [2]中国科学院中国工程物理研究院高功率激光物理联合实验室,上海201800 [3]中国科学院大学材料与光电研究中心,北京100049 [4]江南大学理学院,江苏无锡214122

出　　处：《光学学报》2022年第14期109-116,共8页Acta Optica Sinica

基　　金：国家自然科学基金(61827816,11875308,61905261);上海市“科技创新行动计划”项目(19142202600);中国科学院科研仪器设备研制项目(YJKYYQ20180024);中国科学院战略性先导科技专项(A类)项目(XDA25020306);中国科学院国际合作局对外合作重点项目(181231KYSB20170022)。

摘　　要：倾斜刃边法测量光学传递函数(OTF)只能准确地获取单一方向上的调制传递函数(MTF),且无法测量Zernike像差系数。傅里叶叠层成像技术在获得超分辨图像的同时能够重建光学系统的光瞳函数,实现Zernike像差系数和二维OTF的振幅与相位的测量。以往通过相机整体平移进行孔径扫描来实现宏观傅里叶叠层成像的方法难以适用于OTF测量光路中,因此提出了电控平移台带动照明光纤运动来实现光瞳在频域的平移,具有移动间距可调、亮度高和相干性好的优点。根据OTF测量光路搭建了实验平台,利用宏观傅里叶叠层成像技术对双胶合透镜及其存在遮拦的情况进行了测量,重建其光瞳函数,计算出Zernike像差系数和OTF。通过测量高清成像镜头,分析了采集步数和重叠率对准确性的影响。实验结果表明,子午方向和弧矢方向的MTF测量结果与传函仪测量结果的均方误差在10^(-4)量级。When the slanted-edge method is applied to measure the optical transfer function(OTF), it not only can just accurately obtain the modulation transfer function(MTF) in a single direction, but also fails to measure the Zernike aberration coefficients. In contrast, Fourier ptychography can obtain super-resolution images and reconstruct the pupil function of the optical system, thereby achieving the simultaneous measurement of Zernike aberration coefficients, and the amplitude and phase of the two-dimensional OTF. The previous macroscopic Fourier ptychography method by aperture scanning during the translation of the whole camera is not applicable to the optical path for OTF measurement. Therefore,driving lighting fibers into motion with an electronically controlled translation platform is proposed to achieve pupil translation in the frequency domain, and this method has the advantages of adjustable moving intervals, high brightness,and favorable coherence. The experimental setup is built according to the optical path for OTF measurement, and a doublet and the presence of obstruction are measured by macroscopic Fourier ptychography. The corresponding pupil function is reconstructed, and Zernike aberration coefficients and the OTF are calculated. The effects of the number of acquisition steps and the overlap rate on accuracy are analyzed by measuring high-resolution imaging lens. The experimental results show that the mean square errors of the MTF measurement results in meridian and sagittal directions relative to the measurement results of the OTF measuring equipment are in the 10^(-4)magnitude.

关 键 词：测量 光学传递函数 调制传递函数 傅里叶叠层成像 光学测量 光瞳函数 

分 类 号：O438.2[机械工程—光学工程]