光子晶体垂直腔面发射激光器的设计分析  

Design and Analysis of Photonic Crystal Vertical-Cavity Surface-Emitting Lasers

作　　者：潘智鹏 李伟[1] 戚宇轩 吕家纲 刘素平[1] 仲莉[1] 马骁宇[1,2] Pan Zhipeng;Li Wei;Qi Yuxuan;LüJiagang;Liu Suping;Zhong Li;Ma Xiaoyu(National Engineering Research Center for Optoelectronic Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所光电子器件国家工程中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《光学学报》2022年第14期123-129,共7页Acta Optica Sinica

基　　金：国家自然科学基金(62174154)。

摘　　要：光子晶体垂直腔面发射激光器(PCVCSEL)是在传统的氧化限制型垂直腔面发射激光器(VCSEL)的基础上引入二维光子晶体结构的一种新型激光器,可以实现大功率的基横模输出。提出了PCVCSEL结构的合理设计方法,当归一化频率Veff位于2.405附近时实现了稳定的基横模输出。通过二维等效折射率模型分析对比了基横模PCVCSEL和缩小氧化孔径实现基横模的传统VCSEL,前者可以实现更大的横向限制并具备更宽的光场宽度。通过热电耦合模型分析了PCVCSEL的电流分布和温度分布,证明电流和热量主要集中在氧化限制孔所对应的区域。成功制备出了单模输出功率达到1.6 mW的PCVCSEL,其激射波长为932 nm。The photonic crystal vertical-cavity surface-emitting lasers(PCVCSEL)are the new lasers with twodimensional photonic crystal structure based on the traditional oxide aperture confined vertical-cavity surface-emitting(VCSEL)lasers,which can achieve high-power fundamental transverse mode output.A reasonable design method for PCVCSEL structure is proposed,and a stable fundamental transverse mode output is achieved when the normalized frequency Veff is around 2.405.Through the two-dimensional equivalent refractive index model,the fundamental transverse mode PCVCSEL and the traditional VCSEL with reduced oxide aperture are compared and analyzed.The former can achieve greater lateral limitation and wider optical field width.The current distribution and temperature distribution of PCVCSEL are analyzed by thermoelectric coupling model.It is proved that the current and heat are mainly concentrated in the area corresponding to the oxide confined aperture.A PCVCSEL with a single-fundamental-mode output power of 1.6 mW with a lasing wavelength of 932 nm is successfully fabricated.

关 键 词：激光器 垂直腔面发射激光器 光子晶体 基横模 二维等效模型 热电耦合 

分 类 号：TN248.4[电子电信—物理电子学]