高频非共振激励下氮化硅薄膜机械振子的频率响应  

Frequency Response Characteristics of SiN Membrane Resonators with High-Frequency Nonharmonic Excitation

作　　者：张强[1,2] 姜鑫强 王豆豆 李永民 Zhang Qiang;Jiang Xinqiang;Wang Doudou;Li Yongmin(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,Shanxi,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,Shanxi,China)

机构地区：[1]山西大学光电研究所量子光学与光量子器件国家重点实验室,山西太原030006 [2]山西大学极端光学协同创新中心,山西太原030006

出　　处：《光学学报》2022年第13期199-205,共7页Acta Optica Sinica

基　　金：国家自然科学基金(11774209,11804208,12174232,U21A6006);山西省“1331工程”重点学科建设计划资助。

摘　　要：基于氮化硅薄膜和法布里-珀罗腔的光力系统在量子物理及精密测量等领域具有重要的应用价值。氮化硅薄膜机械振子共振频率的实时可调对于控制薄膜与光场的相互作用非常重要。提出并实验验证了利用高频非共振激励调控薄膜振子共振频率的方法。通过建立高频非共振激励下薄膜振子频率响应模型,搭建光纤干涉仪实时监测薄膜振子的运动情况,发现通过调节激励电压幅度可以有效地调控薄膜振子的共振频率,同等激励强度下基模共振频率的漂移量比高阶模大。同时利用该方法对薄膜振子的共振频率进行了稳频,使其漂移率为未加激励时的1/200。该方法为薄膜振子的频率稳定、研究机械模式间线性和非线性耦合以及多模腔光力相互作用等打下了技术基础。Optomechanical systems based on the silicon nitride(SiN) membrane and Fabry-Perot cavity have important application value in quantum physics and precision measurement. The tunability of the resonant frequencies of the SiN membrane is significant for controlling the interaction between the light field and the membrane. In this paper, a method based on high-frequency nonharmonic excitation to adjust the resonant frequencies of the SiN membrane is proposed and demonstrated experimentally. First, we establish the theoretical frequency-response model of the SiN membrane resonator with a high-frequency nonharmonic excitation. Then, a fiber-optic Fabry-Perot interferometer is constructed to measure the vibration of the SiN membrane. Experimental results show the resonant frequencies of the SiN membrane can be adjusted by controlling the exciting voltage. The frequency shift of fundamental mode is more than that of high-order modes. Further, the proposed method is used to stabilize the resonant frequency of the SiN membrane, and the corresponding frequency shift rate is 1/200 of that without excitation. This paper provides a simple and robust method for stabilizing the resonant frequencies of SiN membranes and for controlling the linear and nonlinear coupling between mechanical modes and multi-mode cavity optical force interaction.

关 键 词：量子光学 光力学 氮化硅薄膜 高频激励 频率响应 

分 类 号：O437[机械工程—光学工程]