双源扩散炉的智能信息系统设计  

Design of Intelligent Information System for Double Source Diffusion Furnace

作　　者：曾振中 黄心沿 朱宗树 张威 ZENG Zhenzhong;HUANG Xinyan;ZHU Zongshu;ZHANG Wei(Hunan Redsolar Photoelectricity Science and Technology Co,Ltd.,Hunan 410205,China;Central South University Sensing Technology Research,Hunan 410083,China;48th Research Institute of CETC,Hunan 410009,China)

机构地区：[1]湖南红太阳光电科技有限公司,湖南410205 [2]中南大学传感技术研究所,湖南410083 [3]中国电科第四十八研究所,湖南410009

出　　处：《电子技术（上海）》2022年第6期18-21,共4页Electronic Technology

摘　　要：阐述半导体材料加工中的扩散掺杂工艺,光伏电池的制备要求时间短、产能量大。依据工程热物理和电子学的要求,探讨传统工业炉为基础的管式扩散炉,在光伏装备领域中作为主流工艺设备,随技术的发展不断地技术更新。掺杂气体可切换的新型双源扩散炉工艺设备推出后,设计过程控制,将组态软件和PLC相结合,实现设备配套的智能信息系统。The diffusion doping process in semiconductor material processing is described.The preparation of photovoltaic cells requires short time and large capacity.According to the requirements of Engineering Thermophysics and electronics,it discusses the tubular diffusion furnace based on the traditional industrial furnace.As the mainstream process equipment in the field of photovoltaic equipment,it is constantly updated with the development of technology.After the introduction of the new dual source diffusion furnace process equipment with switchable doping gas,it designed process control,combined configuration software with PLC,and realized the intelligent information system supporting the equipment.

关 键 词：半导体材料 扩散 掺杂工艺 过程控制 智能信息系统 

分 类 号：TN405[电子电信—微电子学与固体电子学] TP273[自动化与计算机技术—检测技术与自动化装置]