电子轰击有源像素传感器光谱响应测试系统设计  

Design of Spectral Response Test System for Electron Bombardment Active Pixel Sensor

作　　者：严毅赟 钱芸生[1] 张景智 韩坤 郑舟 柳磊 Yan Yiyun;Qian Yunsheng;Zhang Jingzhi;Han Kun;Zheng Zhou;Liu Lei(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;Science and Technology on Low-Light-Level Night Vision Laboratory,Xi’an 710065,Shaanxi,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]微光夜视技术重点实验室,陕西西安710065

出　　处：《激光与光电子学进展》2022年第13期113-118,共6页Laser & Optoelectronics Progress

基　　金：国防基础重点突破项目(JCKY2018208B016);国防预研项目(41414020502)。

摘　　要：电子轰击有源像素传感器(EBAPS)是一种利用真空技术将光阴极、电子敏感有源像素传感器(APS)芯片和基座封装成的真空-固体混合型微光器件。积分灵敏度是EBAPS重要的性能参数之一,但国内目前还缺乏相应的测试手段。因此,基于EBAPS的工作原理和微光像增强器的光谱响应测试方法,用数字-电子转换因子和输出信号得到的电子数对光谱响应度进行表征,并设计了EBAPS的光谱响应测试系统。利用该系统获得了EBAPS器件在−800 V工作电压下的光谱响应曲线,器件的积分灵敏度为3.2×10^(8)(s·lm)^(-1),重复度为0.65%。An electron-bombarded active pixel sensor(EBAPS)is a type of vacuum-solid hybrid low light-level device that encapsulates a photocathode,an electronic-sensitive active pixel sensor(APS)chip,and a base,using vacuum technology.Integral sensitivity is a crucial performance parameter of EBAPS,but corresponding test methods in China are lacking.Therefore,based on the working principle of EBAPS and the spectral response test method of a low-light level-image intensifier,the spectral responsivity is characterized by a digital-electron conversion factor and the number of electrons obtained from the output signal in this study.Moreover,a spectral response test system of EBAPS is designed.The spectral response curves of EBAPS at an operating voltage of−800 V are obtained using this system.The EBAPS’integral sensitivity is 3.2×10^(8)(s·lm)^(−1),and repeatability is 0.65%.

关 键 词：探测器 电子轰击 有源像素传感器 光谱响应 测试系统 电子数 

分 类 号：TN223[电子电信—物理电子学]