基于聚酰亚胺材料的光纤布拉格光栅湿度传感器  

Fiber Bragg Grating Humidity Sensor Based on Polyimide Material

作　　者：邢心魁[1,2,3] 蒋雪 刘凡凡 邝卡斌 覃荷瑛 Xing Xinkui;Jiang Xue;Liu Fanfan;Kuang Kabin;Qin Heying(School of Civil and Architectural Engineering,Guilin University of Technology,Guilin 541004,Guangxi,China;Collaborative Innovation Center for Exploration of Nonferrous Metal Deposits and Efficient Utilization of Resources,Guilin University of Technology,Guilin 541004,Guangxi,China;Guangxi Key Laboratory of Geomechanics and Geotechnical Engineering,Guilin 541004,Guangxi,China)

机构地区：[1]桂林理工大学土木与建筑工程学院,广西桂林541004 [2]桂林理工大学有色金属矿产勘查与资源高效利用协同创新中心,广西桂林541004 [3]广西岩土力学与工程重点实验室,广西桂林541004

出　　处：《激光与光电子学进展》2022年第13期384-389,共6页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51768014);广西创新驱动发展专项(桂科AA20302006)。

摘　　要：提出了一种以聚酰亚胺(PI)为湿敏材料的FBG湿度传感器。首先,在PI毛细管内灌注PI溶液,以在光纤布拉格光栅(FBG)表面实现均匀涂膜。然后,用偶联剂增强湿敏材料和光栅之间的粘结。最后,制作了三组不同厚度和长度的湿度传感器,测试了其湿度传感特性和温度交叉敏感特性。实验结果表明,PI薄膜越厚,湿度传感器的拟合度越低,灵敏度越高,薄膜厚度为0.13 mm的FBG湿度传感器灵敏度为5.5 pm/%RH、量程为30%RH~98%RH、拟合度为0.99、非线性误差为2%,具有良好的可操作性、推广性和适用性。This study proposes a fiber Bragg grating(FBG)humidity sensor using polyimide(PI)as a humidity-sensitive material.First,to homogenously coat the FBG’s surface,a PI solution is perfused into a PI capillary.Then,a coupling agent is used to strengthen the bond between the humidity-sensitive material and FBG.Finally,three groups of humidity sensors with different thicknesses and lengths are fabricated,and their humidity sensing and temperature cross-sensitivity characteristics are tested.The experimental results show that the thicker the PI film is,the lower the fitting degree is and the higher the humidity sensor’s sensitivity is.The FBG humidity sensor with a film thickness of 0.13 mm shows a sensitivity of 5.5 pm/%RH,a detection range of 30%RH-98%RH,a fitting degree of 0.99,and a nonlinear error of 2%,with good operability,popularization,and applicability.

关 键 词：传感器 光纤传感器 湿度传感器 聚酰亚胺 湿敏材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]