V含量对TaVN薄膜微观结构与摩擦学性能的影响  

Effect of V Content on Microstructure and Tribological Properties of TaVN Films

作　　者：阎红娟 李春阳 司丽娜 刘峰斌 张韶华[2] 卿涛[2] 刘懿锋 YAN Hongjuan;LI Chunyang;SI Lina;LIU Fengbin;ZHANG Shaohua;QING Tao;LIU Yifeng(School of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144,China;Beijing Institute of Control Engineering,Beijing 100190,China)

机构地区：[1]北方工业大学机械与材料工程学院,北京100144 [2]北京控制工程研究所,北京100190

出　　处：《润滑与密封》2022年第8期1-6,共6页Lubrication Engineering

基　　金：国家自然科学基金项目(51575004);北京市自然科学基金-市教委联合资助项目(KZ201910009010);北京市自然科学基金项目(3212003;3204037);北方工业大学毓优团队计划项目(XN212/017)。

摘　　要：为探讨V元素改善TaN薄膜摩擦学性能的机制,利用磁控溅射仪在304不锈钢基体上和单晶Si片制备不同V含量的TaVN薄膜。使用X射线衍射仪、扫描电镜、显微硬度计、表面综合性能测试仪表征和分析薄膜的结构及性能。结果表明:TaVN薄膜为面心立方结构,不同V含量的TaVN薄膜均在(111)晶面呈现择优取向;随着V含量的增加,TaVN薄膜(111)晶面出现向大角度偏移的现象;不同V含量的TaVN薄膜在扫描电子显微镜下的表面光滑平整无孔隙,膜层与基体间界面清晰,截面呈明显的柱状晶结构;随着V含量的增加,TaVN薄膜硬度先升高后降低,当TaV靶材中V原子分数为15%时,硬度最高;随着V含量的增加,摩擦因数降低,其原因是在摩擦的过程中,薄膜中的V元素氧化形成具有自润滑效果的Magnéli相氧化物V_(2)O_(5);随着V含量的增加,TaVN薄膜磨损机制由磨粒磨损、黏着磨损和氧化磨损转变为磨粒磨损和氧化磨损。In order to explore the mechanism of V element improving the tribological properties of TaN films,a highvacuum magnetron sputtering system was used to prepare TaVN films with different V contents on 304 stainless steel and single crystal Si wafer.The X-ray diffractometer(XRD),the scanning electron microscope(SEM),the microhardness tester and the surface property tester were used to analyze and characterize the structure and properties of TaVN films.The results show that the TaVN film exhibits a face-centered cubic structure,and the TaVN films with different V contents have a preferred orientation on the(111)crystal plane.With the increase of V contents,the(111)crystal plane shifts to the right.The surfaces of the TaVN films are smooth and flat,without porosity.The interface between the film layer and the substrate is clear,and the cross-section of TaVN film shows columnar structure.With the increase of V content,the hardness of the TaVN films firstly increases and then decreases.The hardness of TaVN film with 15%V content in TaV target reaches the maximum value.With the increase of V content,the friction coefficient of TaVN film decreases.The reason is that V element is oxidized to form self-lubricating Magnéli phase V_(2)O_(5) during the friction process.With the increase of V content,the wear mechanism of TaVN films changes from abrasive wear,adhesive wear and oxidative wear to abrasive wear and oxidative wear.

关 键 词：TaVN薄膜 微观结构 硬度 摩擦学性能 

分 类 号：TH117.1[机械工程—机械设计及理论] TG174[金属学及工艺—金属表面处理]