“PERC+SE”单晶硅太阳电池氧化工艺研究  

RESEARCH ON OXIDATION PROCESS OF“PERC+SE”MONO-Si SOLAR CELLS

作　　者：刘苗 张建军 张永 许志卫 李景 Liu Miao;Zhang Jianjun;Zhang Yong;Xu Zhiwei;Li Jing(JA Solar Co.,Ltd.,Xingtai 055550,China)

机构地区：[1]晶澳太阳能有限公司,邢台055550

出　　处：《太阳能》2022年第8期70-74,共5页Solar Energy

摘　　要：“PERC+SE”单晶硅太阳电池制备过程中,相较于传统的酸抛工艺,在碱抛光工艺之前(即氧化环节)先要制备氧化层SiO_(2)膜作为掩膜,以保护硅片正面。目前,行业内主要有2种制备SiO_(2)膜的方式,一种是采用管式扩散炉,另一种是采用链式氧化炉。从实际应用来看,相较于管式扩散炉,链式氧化炉的生产线兼容性更好,产能也更高;而从理论上来看,管式扩散炉比链式氧化炉制备的SiO_(2)膜更加致密,膜层对掺杂区域的保护也更好。对于这2种设备,从制备的SiO_(2)膜厚度,硅片氧化前、后和碱抛光后的方块电阻变化,以及制得的“PERC+选择性发射极(SE)”单晶硅太阳电池的电性能3个方面进行详细对比。结果显示:管式扩散炉与链式氧化炉制备的SiO_(2)膜对SE激光重掺杂区域的保护效果略有差别,但对太阳电池电性能的影响较小,可忽略。因此,结合生产线兼容性及产能情况,链式氧化炉比管式扩散炉更具有推广优势。In the preparation process of“PERC+SE”mono-Si solar cell,compared with traditional acid polishing process,before the alkali polishing process(the oxidation process)first to prepare an oxide layer SiO_(2) film as a mask to protect the front side of the silicon wafer.At present,there are two main ways to prepare SiO_(2) film in the industry,one is using a tubular diffusion furnace,and the other is using a chain oxidation furnace.From the practical application point of view,compared with the tubular diffusion furnace,the chain oxidation furnace has better production line compatibility and higher production capacity;and theoretically,compared with chain oxidation furnace,the SiO_(2) film prepared by the tubular diffusion furnace is more dense and can protect the doped region better.For these two types of devices,this paper makes a detailed comparison from three aspects,the thickness of the prepared SiO_(2) film,the change of sheet resistance before and after oxidation of the silicon wafer and after alkali polishing,and the electrical properties of the prepared“PERC+SE”mono-Si solar cell.The results show that the protective effect of the SiO_(2) film prepared by the tubular diffusion furnace and the chain oxidation furnace on the heavily doped area of SE laser is slightly different,but the effect on the electrical properties of the solar cell is small and can be ignored.Therefore,combined with the production line compatibility and production capacity of the chain,the chain oxidation furnace has more promotion advantages than the tubular diffusion furnace.

关 键 词：单晶硅太阳电池 选择性发射极 PERC 碱抛光 SiO_(2)膜 掩膜 

分 类 号：TK514[动力工程及工程热物理—热能工程]