Flexible substrates enabled highly integrated patterns with submicron precision toward intrinsically stretchable circuits  

作　　者：Wenkun Lv Zhaoxin Liu Zheng Li Zhifei Han Yongrui Yang Qi Li Yali Qiao Yanlin Song 

机构地区：[1]Beijing National Laboratory for Molecular Sciences,Key Laboratory of Green Printing,CAS Research/Education Centre for Excellence in Molecular Sciences,Institute of Chemistry Chinese Academy of Sciences(ICCAS),Beijing,China [2]School of Chemistry and Chemical Engineering,University of the Chinese Academy of Sciences,Beijing,China [3]State Key Laboratory of Trauma,Burn and Combined Injury,Institute of Burn Research,Southwest Hospital,Army Medical University,Chongqing,China [4]State Key Laboratory of Power Systems,Department of Electrical Engineering,Tsinghua University,Beijing,China

出　　处：《SmartMat》2022年第3期503-512,共10页智能材料（英文）

基　　金：Beijing National Laboratory for Molecular Sciences,Grant/Award Numbers:BNLMSCXXM‐202005,2019BMS20003;National Natural Science Foundation of China,Grant/Award Number:2018YFA0703200;K.C.Wong Education Foundation,and China Postdoctoral Science Foundation,Grant/Award Number:2020M670466;External Cooperation Program of Chinese Academy of Sciences,Grant/Award Number:GJHZ201948;CAS‐VPST Silk Road Science Fund 2022,Grant/Award Number:121111KYSB20210006;National Key R&D Program of China,Grant/Award Numbers:52003276,22175185,52003273,51803217,51773206,91963212,51961145102,22002171。

摘　　要：Fabricating high integration density,high resolution,and intrinsically stretchable patterns by patterned technologies remain challenging.Template printing enabled high-precision patterned fabrication at a facile operation.However,the pattern spacing constraint is the major limitation to high integration density.In this study,we develop an elastomer-assisted strategy to improve the template printing process,which involves patterning on the prestrain elastic substrate.This strategy overcomes the spacing limitation and enables the realization of a centimeter-scale pattern with submicron precision.Particularly,the integration density of fabricated intrinsically stretchable patterns can reach 1932 lines on a substrate of 0.5 cm2;the assembly lines with a feature size of 880 nm and an interval of 955 nm.Furthermore,we demonstrate a facile approach for constructing silver nanoparticle/liquid metal alloy composite conductive patterns.The as-prepared flexible electrodes can withstand up to 150%strain and a 2-mm bend radius.This method provides new insights into template printing technology.Additionally,it opens a route for the simultaneous construction of functional patterned arrays with large scale,high integration density,and intrinsic stretchability,which will be useful for the integrated fabrication of various flexible electronic devices.

关 键 词：flexible devices highly integrated patterns liquid metal alloys printed electronics stretchable electronics 

分 类 号：TN405[电子电信—微电子学与固体电子学]