氮氧化物气体传感器氧气干扰的补偿方法  

Compensating method for oxygen interference of oxynitride gas sensor

作　　者：钱显威 李雪宾 周明军 宋长营 简家文[1] 邹杰[1] QIAN Xianwei;LI Xuebin;ZHOU Mingjun;SONG Changying;JIAN Jiawen;ZOU Jie(College of Information Science and Engineering,Ningbo University,Ningbo 315211,China;The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China;Zhejiang Kreation Electronic Technology Co Ltd,Huzhou 313000,China)

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211 [2]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028 [3]浙江科瑞信电子科技有限公司,浙江湖州313000

出　　处：《传感器与微系统》2022年第9期34-37,41,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金面上资助项目(61971251);国家博士后基金资助项目(2019M663474);浙江省自然科学基金一般资助项目(LY18F010009);浙江省基础公益研究计划项目(LGG22F010017);宁波市自然科学基金资助项目(2018A610002)。

摘　　要：本文采用开放式氮氧化物(NO_(x))传感器控制单元对自研的NO_(x)传感器敏感探头进行了标定测试。通过上位机软件对NO传感器敏感探头的各项数据进行采集和分析,提出了一种利用主泵电流对NO_(x)体积分数测量过程中O_(2)干扰进行补偿的修正方法,并推导出了计算公式。实验结果表明:该方法能够建立起更好地测量泵电流与NO体积分数值的对应关系,克服了在测量过程中的O_(2)干扰,显著提高了NO传感器的测量精度。Sensitive probe of self-innovate oxynitride(NO_(x))sensor is calibrated and test by open type oxynitride sensor control unit and all data of sensitive probe are acquired and analyzed by upper PC software.A compensating method is proposed by using main pumping current to remove the interference from oxygen volume fraction during the NO_(x)measurements and the calculation formular is derived.The experimental results indicate that the interference from oxygen volume fraction can be overcomed by the proposed method and better relationships between measured pumping current and NO_(x)volume fraction are set up.Meanwhile, the measuring precision of NO_(x)sensor is enhanced.

关 键 词：气体传感器 氮氧化物 校正 氧气干扰 补偿方法 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]