DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images  

作　　者：Hongchu Du 

机构地区：[1]Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons(ER-C2),Forschungszentrum Juelich GmbH,52428,Jülich,Germany [2]Central Facility for Electron Microscopy(GFE),RWTH Aachen University,52074,Aachen,Germany

出　　处：《Nanomanufacturing and Metrology》2022年第2期101-111,共11页纳米制造与计量（英文）

基　　金：Financial support from the German Research Foundation(SFB917)is acknowledged;Open Access funding enabled and organized by Projekt DEAL.

摘　　要：Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as intuitive presentation of the resolved atomic structures.

关 键 词：Quantitative TEM Nonlinear least-squares fitting Image quantification Image analysis Atomic-scale metrology 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]