基于溶液法制备的PVDF及PVDF-TrFE柔性压电传感器阵列  

PVDF and PVDF-TrFE Flexible Piezoelectric Sensor Arrays Prepared By Solution Method

作　　者：张博 张婕 Zhang Bo;Zhang Jie(School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China;Jiangsu State Key Lab of Advanced Food Manufacturing and Equipment,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学机械工程学院,江苏无锡214122 [2]江南大学江苏省食品先进制造与装备重点实验室,江苏无锡214122

出　　处：《微纳电子技术》2022年第7期672-680,717,共10页Micronanoelectronic Technology

基　　金：江苏省产业前瞻项目(BE2017069)。

摘　　要：柔性压电式传感器动态范围宽、灵敏度高、机械性能好,其中以聚偏二氟乙烯(PVDF)及聚偏二氟乙烯三氟乙烯(PVDF-TrFE)材料制备的压电传感器作为代表,倍受柔性电子制造领域的关注。使用PVDF和PVDF-TrFE乳胶溶液法,通过优化旋涂工艺在聚对苯二甲酸乙二醇酯(PET)柔性基底上制备了压电薄膜,并采用丝网印刷工艺制备了厚度均匀、各阵列点性能一致的4×4 PVDF和PVDF-TrFE压电传感器阵列。通过自主搭建电晕极化系统对实验样品进行极化,以提高其压电性能。该系统可在6 min内完成传感器的极化,具有效率高、极化均匀性好等优点。通过对溶液法制备的压电薄膜进行Fourier变换红外吸收光谱(FTIR)、X射线衍射(XRD)谱、扫描电子显微镜(SEM)图及传感器压电性能测试,结果发现电晕极化后压电薄膜的材料特征(β相)明显提高,电晕极化后PVDF-TrFE传感器的峰值电压从310 mV提升到431 mV,其4×4传感器阵列的压电系数(d_(33))为32.90 pC/N,相比未电晕极化传感器阵列的提高0.4倍。通过100次弯曲循环,制备的柔性传感器的压电性能无明显变化,从而充分证明了用溶液法制备的PVDF和PVDF-TrFE柔性传感器具备可靠性和可重复使用性。Piezoelectric flexible sensors have wide dynamic range,high sensitivity and good mechanical properties.The piezoelectric sensors made of polyvinylidene fluoride(PVDF)and polyvinylidene trifluoroethylene(PVDF-TrFE)have attracted much attention in the field of flexible electronics manufacturing.Piezoelectric thin films were prepared on polyethylene terephterate(PET)flexible substrates by optimizing the spin coating process with PVDF and PVDF-TrFE emulsion solutions,and 4×4 PVDF and PVDF-TrFE piezoelectric sensor arrays with uniform thickness and consistent properties were prepared by screen printing process.The corona polarization treatment was performed on a home-made corona polarization system to improve the piezoelectric performance of the sensors.The polarization system can complete the polarization of the sensor in 6 min and has the advantages of high efficiency and good uniformity.Fourier transform infrared absorption spectrogram(FTIR),X-ray diffraction(XRD)spectrum,scanning electron microscope(SEM)images of the piezoelectric thin films prepared by solution method and piezoelectric properties of the sensors were tested.The results show that after corona polarization,the material characteristics(βphase)of the piezoelectric thin films are obviously improved,and the peak voltage of the corona-polarized PVDF-TrFE sensor is improved from 310 mV to 431 mV.The piezoelectric coefficient(d_(33))of the 4×4 PVDF-TrFE sensor array reaches 32.90 pC/N,and is 0.4 times higher than that of the PVDF-TrFE sensor array before corona polarization.After 100 bending cycles,the piezoelectric properties of the PVDF and PVDF-TrFE flexible sensors prepared by solution method do not change significantly,fully proving that the PVDF and PVDFTrFE flexible sensors prepared by solution method have reliability and repeatability。

关 键 词：柔性压电传感器阵列 电晕极化 匀胶旋涂 丝网印刷 压电系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]