压电悬臂梁驱动传感共位特性研究  

Research on Co-Location Characteristics of Piezoelectric Cantilever Drive Sensor

作　　者：伍德 彭来湖[1,2] WU De;PENG Laihu(Key Laboratory of Modern Textile Equipment Technology,Zhejiang Sci-Tech University,Hangzhou 310018,China;Hangzhou Qincheng Microelectronics Technology Co.,Ltd.,Hangzhou 310018,China)

机构地区：[1]浙江理工大学浙江省现代纺织装备技术重点实验室,浙江杭州310018 [2]杭州勤诚微电子科技有限公司,浙江杭州310018

出　　处：《轻工机械》2022年第4期71-78,共8页Light Industry Machinery

基　　金：2020年度浙江省博士后科研项目择优资助项目(ZJ2020004)。

摘　　要：为了探究压电陶瓷悬臂梁结构的驱动传感共位特性,笔者研究了以压电耦合悬臂梁样机分别作为传感器、驱动器和驱动传感共位时电流的变化规律,分析了压电悬臂梁被限位工作条件下其共位信号与空载状态信号的差异性,通过检测压电悬臂梁内部电流的变化来实现对压电悬臂梁驱动状态的共位检测。实验结果表明:在电压的激励下,压电悬臂梁在未被限位工作条件下,仅存在频率大小约为230 Hz的响应信号;压电悬臂梁在限位条件工作时,其采样信号在230 Hz和1640 Hz附近处有明显响应,且仿真结果与实验结果误差均在4%以内。该实验结果证明了可将压电陶瓷悬臂梁内部电流变化所对应的特征频率作为其工作状态的判定。To investigate the co-location characteristics of the piezoelectric ceramic cantilever beam structure,the variation law of current when using the piezoelectric coupled cantilever as sensor,driver and drive sensor respectively.The difference between the co-location signal and the no-load state signal under the restricted operating conditions of the piezoelectric cantilever beam was revealed,and the internal current change of the piezoelectric cantilever beam was detected to achieve the co-location detection of the driving state of the piezoelectric cantilever beam.The experimental results show that under voltage excitation,the piezoelectric cantilever beam only has a response signal with a frequency of approximately 230 Hz under unrestricted operating conditions;when the piezoelectric cantilever beam is operating under restricted conditions,the sampled signal has a significant response around 230 Hz and 1640 Hz,and the error between the simulation and experimental results is within 4%.The experimental results demonstrate that the characteristic frequency corresponding to the change in current inside a piezoelectric ceramic cantilever beam can be used as a determination of its operating state.

关 键 词：压电悬臂梁 共位检测 振动 传感驱动器 

分 类 号：TH89[机械工程—仪器科学与技术] TB381[机械工程—精密仪器及机械]