油气润滑在脆硬材料多线切割设备中的应用  

Application of Oil-air Lubrication in Spindle Design of Multiwire Sawing Equipment

作　　者：周建军 杨晓静[1] ZHOU Jianjun;YANG Xiaojing(The 45thResearch institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2022年第3期43-47,共5页Equipment for Electronic Products Manufacturing

摘　　要：针对半导体脆硬材料的切割加工成为多线切割设备发展的突出因素,通过与传统多线切割设备轴系比对分析,设计了适合碳化硅等脆硬材料切割加工设备轴系的油气润滑方式。通过实验比对得出使用油气润滑提升了多线切割设备的工艺优越性及精密性。In accordance with semiconductor hard-brittle materials cutting to be becoming the main factor of multiwire sawing equipment development,analyzed by comparing with the structure of traditional spindle system components of multiwire sawing equipment,designed the spindle system based on merits of oil-air lubrication.With the compared experimental data,the precision and merits of multiwire sawing equipment are improved by using oil-air lubrication spindles.

关 键 词：油气润滑 脆硬材料 多线切割 

分 类 号：TN305.1[电子电信—物理电子学]