High-Temperature Superconducting YBa_(2)Cu_(3)O_(7-δ)Josephson Junction Fabricated with a Focused Helium Ion Beam  

作　　者：Ziwen Chen Yulong Li Rui Zhu Jun Xu Tiequan Xu Dali Yin Xinwei Cai Yue Wang Jianming Lu Yan Zhang * and Ping Ma 陈紫雯;李宇龙;朱瑞;徐军;徐铁权;殷大利;蔡欣炜;王越;路建明;张焱;马平(Applied Superconductivity Research Center,Peking University,Beijing 100871,China;State Key Laboratory for Artificial Microstructure and Mesoscopic Physics,Peking University,Beijing 100871,China;School of Physics,Peking University,Beijing 100871,China;Electron Microscopy Laboratory,School of Physics,Peking University,Beijing 100871,China)

机构地区：[1]Applied Superconductivity Research Center,Peking University,Beijing 100871,China [2]State Key Laboratory for Artificial Microstructure and Mesoscopic Physics,Peking University,Beijing 100871,China [3]School of Physics,Peking University,Beijing 100871,China [4]Electron Microscopy Laboratory,School of Physics,Peking University,Beijing 100871,China

出　　处：《Chinese Physics Letters》2022年第7期87-92,共6页中国物理快报（英文版）

基　　金：supported by the National Key Research and Development Program of China(Grant No.2017YFC0601901);the National Natural Science Foundation of China(Grant No.61571019)。

摘　　要：As a newly developed method for fabricating Josephson junctions,a focused helium ion beam has the advantage of producing reliable and reproducible junctions.We fabricated Josephson junctions with a focused helium ion beam on our 50 nm YBa_(2)Cu_(3)O_(7-δ)(YBCO)thin films.We focused on the junction with irradiation doses ranging from 100 to 300 ions/nm and demonstrated that the junction barrier can be modulated by the ion dose and that within this dose range,the junctions behave like superconductor–normal conductor–superconductor junctions.The measurements of the I–V characteristics,Fraunhofer diffraction pattern,and Shapiro steps of the junctions clearly show AC and DC Josephson effects.Our findings demonstrate high reproducibility of junction fabrication using a focused helium ion beam and suggest that commercial devices based on this nanotechnology could operate at liquid nitrogen temperatures.

关 键 词：Josephson Junction Fabricated with a Focused Helium Ion Beam High-Temperature Superconducting YBa_(2)Cu_(3)O 

分 类 号：O511[理学—低温物理] TN03[理学—物理]