一种晶圆自动光学检测系统的混合路径规划算法  

A hybrid path planning algorithm for wafer AOI system

作　　者：肖钰坤 张文涛[1] 杜浩 王秀秀 XIAO Yukun;ZHANG Wentao;DU Hao;WANG Xiuxiu(School of Electronic Engineering and Automation,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004

出　　处：《现代电子技术》2022年第18期11-16,共6页Modern Electronics Technique

基　　金：国家科技重大专项课题(2017ZX02101007-003);国家自然科学基金项目(61965005);广西自然科学基金项目(2019GXNSFDA185010)。

摘　　要：为解决晶圆自动光学检测系统中传统的路径规划算法效率偏低的问题,文中提出一种混合路径规划算法,以实现视场分配和路径优化的综合优化。针对传统算法在视场分配时视场的位置固定导致视场数量过多的问题,文中根据视场和视场内晶圆缺陷的物理尺寸提出增益视场的概念,改进迭代自组织数据分析法,实时动态调整增益视场和视场的位置,使视场能覆盖更多的缺陷,从而有效地减少视场分配的数量;视场分配结束后,以视场中心点为路径节点,采用收敛速度快的局部择优算法进行路径优化。实验结果表明,与传统算法相比,混合路径规划算法规划的路径长度减少50%左右,能够有效地提高晶圆自动光学检测系统的工作效率。In order to solve the problem of low efficiency of traditional path planning algorithm in the wafer AOI(automatic optical inspection) system,a hybrid path planning algorithm is proposed to realize the comprehensive optimization of viewing field allocation and path optimization. As the traditional algorithm can cause too many viewing fields because it fixes the position of viewing filed during the viewing field allocation, the concept of gain viewing field is proposed according to the viewing field and the physical size of wafer defect in the viewing field,the iterative self-organizing data analysis method is improved,and the positions of the gain viewing field and viewing field are adjusted dynamically in real time to make the viewing field cover more defect,so as to effectively reduce the number of viewing field allocation. After the viewing field allocation,the center point of the viewing field is taken as the path node,and the local optimization algorithm with fast convergence is used to conduct the path optimization. The experimental results show that,in comparison with the traditional algorithm,the hybrid path planning algorithm can reduce the path length by about 50%,which can effectively improve the efficiency of the wafer AOI system.

关 键 词：晶圆检测 光学检测系统 晶圆缺陷 视场分配 增益视场 动态调整 路径优化 

分 类 号：TN911.74-34[电子电信—通信与信息系统]