长焦深连续立方相位板的飞秒激光加工与性能测试  

Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance

作　　者：李鹏举 潘登 刘顺利 LI Pengju;PAN Deng;LIU Shunli(College of Engineering Sciences,University of Science and Technology of China,Hefei 230031,China)

机构地区：[1]中国科学技术大学工程科学学院,安徽合肥230031

出　　处：《光学精密工程》2022年第17期2088-2093,共6页Optics and Precision Engineering

基　　金：航空科学基金资助项目(No.2018ZE78004)。

摘　　要：传统的长焦深光束生成器件,诸如空间光调制器和正负透镜组合,存在光学元件尺寸较大、难以与微纳光学系统集成等问题,发展一种长焦深光束生成方法并制备一种结构简单、尺寸紧凑且成像质量良好的长焦深光束器件尤为重要。提出了一种利用连续立方相位板调制来产生长焦深光束的方法,通过飞秒激光直写技术制备了高尺寸精度(直径为108μm,高1.1μm)的相位板,实现了可调控的焦距长度(50~150μm)和焦深(100~600μm),并且对相位板进行光学测试,展示了其长聚焦能力和成像能力。该器件可用于高性能集成光学系统、微纳光学制造等领域。Traditional methods for generating beams with a long depth of focus,such as spatial light modulator and a combination of positive and negative lens,have several limitations,including a large size of optical elements,difficult integration with micro-nano optics and others.This makes the application of optical devices in aviation areas challenging.Thus,it is necessary to develop a method for generating beams with a long depth of focus beam,and fabricating an optical element with a simple structure,compact size,and good imaging quality.In this paper,we achieve this by using continuous cubic phase plate modulation.A phase plate with high dimensional accuracy(108μm in diameter,1.1μm in height)and adjustable focal length(50-150μm)and focal depth range(100-600μm)is fabricated via femtosecond laser direct writing technology.The optical test of the phase plate demonstrates its long depth of focus and imaging ability.This method indicates new avenues in high performance integrated optics,micro/nano-optics manufacturing,and laser micro/nano manufacturing for aeronautical science and technology.

关 键 词：飞秒激光加工 长焦深光束 相位板 光学仿真 光学测试 

分 类 号：O436[机械工程—光学工程]