三角放大型压电陶瓷微纳米驱动机构  

Mini-piezo-element drive microactuator based on triangular amplification

作　　者：胡逸凡 章海军[1] 倪凯佳 HU Yifan;ZHANG Haijun;NI Kaijia(State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学光电科学与工程学院现代光学仪器国家重点实验室,杭州浙江310027

出　　处：《光学精密工程》2022年第17期2094-2099,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61540019)。

摘　　要：提出了一种基于小压电陶瓷条的三角放大型微纳米驱动机构。该机构由两个1.6 mm×1.6 mm×5.0 mm的小压电陶瓷条、三角对称型伸缩臂、大顶角柔性铰链(扫描端)及基座组成,由小压电陶瓷条驱动伸缩臂运动,基于大顶角三角形的放大原理,获得高放大倍率的扫描端输出位移。理论分析与有限元仿真表明,当三角对称型伸缩臂与底边的夹角为6°时,扫描端的位移量与小压电陶瓷条的伸缩量之比可达9倍左右;当驱动电压为80 V时,相比于小压电陶瓷条的伸缩量3.2μm,扫描端的位移量理论值可达29.5μm。显微运动测量实验表明,在相同驱动电压下,扫描端的实际位移量达到26.6μm,实际位移放大倍数达到8.3倍。将该机构作为原子力显微镜的慢轴扫描器,成功实现了基于小压电陶瓷条的宽范围原子力显微镜扫描成像(4μm×26μm),具有良好的分辨率、对比度和线性度。该机构具有原理新颖、结构简洁、成本低廉、性能优越等特点,可望在光学、精密机械及微纳米技术领域获得广泛的应用。This paper proposes a mini-piezo-element drive microactuator based on triangular amplification.The actuator is composed of two 1.6 mm×1.6 mm×5.0 mm mini piezo-elements,two triangular waists serving as symmetrical stretch arms,and one large apex flexure hinge(scanning end).When both stretch arms are driven by the mini-piezo-elements an amplified output displacement on the scanning end can be obtained through triangular amplification.Theoretical analysis and finite element simulation show that when the angle between each triangular stretch arm and the bottom edge is 6°,the ratio of the displacement at the scanning end to the expansion at the mini-piezo-element’s approaches 9∶1.Furthermore,the simulation results show that compared with the displacement of the mini-piezo-element of 3.2μm,under 80 V driving voltage,the displacement of the scanning end can be enlarged to 29.5μm.Micro-motion measurement experiments were conducted under the same driving voltage,and the displacement of the scanning end was measured as 26.6μm,with an actual amplification ratio of 8.3.The proposed mini-piezo-element drive microactuator was successfully employed as the slow axis scanner of an atomic force microscope(AFM)and for wide-range AFM imaging(4μm×26μm).In conclusion,the proposed microactuator is a novel,simple structure that yields good results at low cost and is expected to be widely applied in optics,precision machinery,and micro/nano technology.

关 键 词：微纳米驱动机构 三角放大型 小压电陶瓷条 输出位移 原子力显微镜 

分 类 号：TH472[机械工程—机械制造及自动化]