仿生纤毛微流量传感器及其制备方法  

Bionic cilia micro flow sensor and its preparation method

作　　者：李俊忠 廖晓波 许世林 庄健[2] 蔡勇 LI Junzhong;LIAO Xiaobo;XU Shilin;ZHUANG Jian;CAI Yong(Key Laboratory of Testing Technology for Manufacturing Process,Minsitry of Education,School of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China;School of Mechanical Engineering,Xi′an Jiaotong University,Xi′an 710049,China)

机构地区：[1]西南科技大学制造科学与工程学院制造过程测试技术教育部重点实验室,四川绵阳621010 [2]西安交通大学机械工程学院,陕西西安710049

出　　处：《光学精密工程》2022年第16期1968-1977,共10页Optics and Precision Engineering

基　　金：国家自然科学基金项目(No.52175515);制造过程测试技术教育部重点实验室开放基金项目(No.19kfzk01)。

摘　　要：针对微流体流量测量难度大且精度不高的问题,本文基于压阻原理设计了一种悬臂梁结构的仿生纤毛微流量传感器。本文首先对比分析了现有热线式、压电式和压阻式微流量传感器的优缺点,基于压阻式传感器的应变与阻值之间呈现线性关系的优点,选择压阻应变原理设计微流量传感器;其次,通过有限元数值分析方法确定了微流量传感器最佳仿生纤毛的阵列规模、直径、高度和悬臂梁长度等参数;然后,采用微液滴限制电沉积(Meniscus Confined Electrodeposition,MCED)方法制备了仿生纤毛阵列,并制作了微流量传感器;最后,通过自主设计的实验装置进行验证,结果表明,该传感器可以对大于0.4 m/s的微流速进行灵敏感应并准确测量,且传感器对流体流速测量的非线性误差为2.84%。该仿生纤毛应变式流量传感器在微流量测量领域具有广泛的应用前景。In this study,we designed a piezoresistive cantilever beam structure bionic cilia micro flow sensor to address the problem of difficult and low-accuracy micro fluid flow measurement.First,we compared and analyzed the advantages and disadvantages of existing hot-wire,piezoelectric,and piezoresistive micro flow sensors.Then,we designed a cantilever beam structure micro flow sensor based on the piezoresistive principle,given the superior linearity between the strain and the resistance value of the piezoresistive sensor.Second,parameters such as the optimal array size,diameter,height,and cantilever beam length of the bionic cilia were determined using finite-element numerical analysis.Then,the meniscus-confined electrodeposition method was used to prepare bionic cilia arrays and to fabricate the micro flow sensor.Finally,the experimental results were obtained in a self-made device;they demonstrate that the sensor can accurately sense and measure flow velocities that exceed 0.4 m/s with a nonlinear error of 2.84%.The results indicate that the proposed bionic cilia strain gauge flow sensor has a wide range of applications in micro flow measurement.

关 键 词：液滴限制电沉积 仿生纤毛微流量传感器 有限元分析与仿真 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]