压电空气耦合超声换能器制备优化及实验验证  

Preparation Optimization and Experimental Verification of Piezoelectric Air-Coupled Ultrasonic Transducer

作　　者：董方旭[1] 周鑫翊 刘发付 凡丽梅[1] 高华昀 窦占明 段剑[1] 姜胜林[5] 张海波[2] DONG Fangxu;ZHOU Xinyi;LIU Fafu;FAN Limei;GAO Huayun;DOU Zhanming;DUAN Jian;JIANG Shenglin;ZHANG Haibo(The Fifth Third Research Institute of China North Industries Group Corporation,Jinan 250031,China;State Key Laboratory of Material Processing and Die&Mould Technology,School of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;The Fifth Second Research Institute of China North Industries Group Corporation,Baotou 014000,China;China Zhenhua(Group)Yunke Electronics Co.,Ltd.,Guiyang 550018,China;School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]中国兵器工业集团第五三研究所,山东济南250031 [2]华中科技大学材料科学与工程学院材料成形与模具技术国家重点实验室,湖北武汉430074 [3]中国兵器工业集团第五二研究所,内蒙古包头014000 [4]中国振华集团云科电子有限公司,贵州贵阳550018 [5]华中科技大学光学与电子信息学院,湖北武汉430074

出　　处：《压电与声光》2022年第4期552-556,共5页Piezoelectrics & Acoustooptics

摘　　要：空气耦合超声换能器作为一种无损检测(NDT)的重要设备,具有广阔应用前景,但由于压电元件与空气声阻抗失配导致低带宽(BW)、低灵敏度(SNS)及高双程插入损耗等缺陷而阻碍其应用。该文对空气耦合超声换能器制备工艺进行优化,使用COMSOL软件模拟了压电元件的尺寸设计。同时通过采用1-3型压电复合元件与优化环氧树脂+空心玻璃微珠匹配层调控压电元件与空气的声阻抗,制备了工作频率400 kHz的空气耦合换能器。在工作频率时,该换能器的厚度振动模态较纯,带宽较宽,灵敏度与双程插入损耗为-38 dB。结果表明,采用该文自研工艺制备的空气耦合超声换能器具有良好的性能与巨大应用潜力。As an important device for non-destructive testing(NDT),the air-coupled ultrasonic transducer has a broad application prospect,but duo to the low bandwidth(BW),low sensitivity(SNS),high two-way insertion loss(IL)and other defects resulted from the mismatch between piezoelectric element and air acoustic impedance,its application is limited.The preparation process of air-coupled ultrasonic transducer is optimized in this paper,and the dimension design of piezoelectric elements is simulated by using COMSOL.An air-coupled transducer with operating frequency of 400 kHz is fabricated through regulating the acoustic impedance of piezoelectric elements and air by using 1-3 piezoelectric composite elements with optimizing matching layers of epoxy resin+hollow glass beads.The transducer has a pure thickness at the operating frequency,a wide bandwidth,and sensitivity with a two-way insertion loss of-38 dB.The results show that the air-coupled ultrasonic transducer fabricated by the self-developed process has good performance and great application potential.

关 键 词：空气耦合 1-3型压电复合元件 匹配层 仿真 换能器 

分 类 号：TB552[理学—物理] TN384[理学—声学]