钽材在真空蒸镀设备中的应用  

作　　者：程静静 段彪王 李宁 

机构地区：[1]西安优耐特容器制造有限公司,西安710201

出　　处：《科技创新与应用》2022年第26期190-192,共3页Technology Innovation and Application

摘　　要：真空蒸镀设备作为有机发光二极管(OLED)面板制程的“心脏”,目前完全依赖进口。该文简述真空蒸镀工艺原理及蒸镀设备中钽蒸发源的国内现状,分析制约我国真空蒸镀设备中钽蒸发源发展的关键因素,如钽材纯度、钽蒸发源加工及钽材焊接等,指出,目前高纯度钽材的生产、复杂形状的钽蒸发源成形及有效的焊接方法成为国内制造真空蒸镀设备用钽蒸发源急需突破的技术壁垒。Vacuum evaporation equipment,as the "heart" of OLED panel manufacturing process,is completely dependent on imports.This paper briefly describes the principle of vacuum evaporation process and the domestic status of tantalum evaporation sources in vacuum evaporation equipment,and analyzes the key factors restricting the development of tantalum evaporation sources in vacuum evaporation equipment in China,such as tantalum purity,tantalum evaporation source processing and tantalum welding,etc.,and points out that the current production of high purity tantalum materials.The forming of tantalum evaporation source with complex shape and effective welding methods have become the technical barriers that urgently need to be broken through for the manufacture of tantalum evaporation source for vacuum evaporation equipment.

关 键 词：真空蒸镀 钽蒸发源 高纯度钽材 钽材焊接 钽材加工 

分 类 号：TG44[金属学及工艺—焊接]