基于Zemax的新型对称式气体吸收池设计  

Design of new symmetrical gas absorption cell based on Zemax

作　　者：孙奥龙 钱宇昊 王凯源 黎灵杰 曹凯云 赖建军 张学明[1] SUN Aolong;QIAN Yuhao;WANG Kaiyuan;LI Lingjie;CAO Kaiyun;LAI Jianjun;ZHANG Xueming(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China;Ezhou Institute of Industrial Technology,Huazhong University of Science and Technology,Ezhou 436044,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]华中科技大学武汉光电国家研究中心,湖北武汉430074 [3]华中科技大学鄂州工业技术研究院,湖北鄂州436044

出　　处：《光学技术》2022年第4期445-451,共7页Optical Technique

基　　金：华中科技大学大学生创新创业训练计划项目GD2021243。

摘　　要：为了降低光学气体浓度传感器的制造成本,利用Zemax光学设计软件设计并优化了一种适用于热光源的米级光程红外气体吸收池结构。结构由两个准直、聚焦光线的抛物面反射镜和五个用于增加光程的平面镜构成。仿真结果表明,气体吸收池由于几何结构导致的光功率损耗仅为1%,其光程达到了1049.75mm,对比传统透镜结构的气体吸收池,此结构具有体积小、光程长、损耗率低以及拓展性强等特点,可应用于构建低成本、亚PPM级红外气体传感器。In order to reduce the manufacturing cost of optical gas concentration sensor, a meter-optical-path infrared gas absorption cell structure is designed and optimized by using ZEMAX optical design software. The structure consists of two parabolic mirrors for collimating and focusing light and five planar mirrors for increasing optical path. The simulation results show that the geometric loss of the gas absorption cell is only 1%, and the optical path is 1049.75 mm. Compared with the gas absorption cell with traditional lens structure, the structure has the characteristics of small volume, long optical path, low loss rate and strong expansibility, and can be used to construct low cost and sub-ppm level infrared gas sensor.

关 键 词：光学设计 气体吸收池 ZEMAX 反射式结构 气体浓度检测 

分 类 号：TN25[电子电信—物理电子学]