新型箝位式压电电机的设计研究  

Research of a Novel Piezoelectric Drive Motor Using the Clamping Mechanism

作　　者：岳志涵 潘巧生 陶圣至 商静怡 李晓杰 YUE Zhi-han;PAN Qiao-sheng;TAO Sheng-zhi;SHANG Jing-yi;LI Xiao-jie(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei,Anhui 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《计量学报》2022年第8期1077-1082,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金(52175533);中央高校基本科研业务费(PA2021KCPY0049);安徽省重点研发计划(202104h04020025);大学生创新创业计划项目(S202110359317、X202110359361)。

摘　　要：针对传统箝位式压电电机在谐振态下工作时,方波振动的箝位部分结构设计复杂问题,提出一种新型箝位式压电电机。该电机箝位部分与驱动部分均由同频正弦电压驱动实现正弦振动,通过定子对动子的箝位接触,实现动子单向输出运动。相较于传统箝位式压电电机和超声电机,该电机的定子结构设计无需采用模态简并,结构设计难度降低。利用有限元仿真确定定、动子结构参数,制造样机并搭建实验平台。对箝位部分分别采用正弦波与方波做激励,再对驱动部分进行波形对比,表明正弦波亦能达到预期效果。实验结果表明:准静态时,激励电压频率为250 Hz、电压峰峰值V为10 V时,步进距离为0.5μm,步进速度0.13 mm/s;谐振态时,激励电压频率为540 Hz、电压峰峰值V为70 V时,步进距离为32μm,步进速度16.9 mm/s;该电机可兼顾低频高分辨率和高频高速输出以实现跨尺度工作。A novel clamped piezoelectric motor is proposed to solve the complex structure design problem of the clamped part of the square wave vibration when the traditional clamped piezoelectric motor works in the resonant state.Both the clamping part and the driving part of the motor are driven by a sinusoidal voltage of the same frequency to realize sinusoidal vibration. And the unidirectional output motion of the rotor is realized through the clamping contact between the stator and the rotor. Compared with the traditional clamping piezoelectric motor and the ultrasonic motor, the stator structure design does not need to adopt mode degeneration, which reduces the difficulty of the structure design.The structural parameters of stator and rotor are determined by finite element simulation, and the prototype is manufactured and the experimental platform is built.The clamping part is stimulated by sine wave and square wave respectively, and the waveform comparison of the driving part shows that the sine wave can also achieve the expected effect.The experimental results show that under quasi-static state, when the excitation voltage frequency is 250 Hz and the voltage peak value Vis 10 V, the step distance is 0.5 μm, the stepping speed is 0.13 mm/s;under resonant state, when the excitation voltage frequency is 540 Hz and the voltage peak value Vis 70 V, the step distance is 32 μm, the stepping speed is 16.9 mm/s;the motor can achieve cross scale operation by taking into account low-frequency high-resolution and high-frequency high-speed output.

关 键 词：计量学 压电电机 跨尺度驱动 箝位机构 正弦驱动 

分 类 号：TB971[一般工业技术—计量学]