基于原子力显微镜的自动控制教学实验系统  

Experimental System for Teaching of Automatic Control Theory Based on Atomic Force Microscopy

作　　者：张健[1] 彭超[1] 范嘉文 ZHANG Jian;PENG Chao;FAN Jiawen(School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学自动化工程学院,成都611731

出　　处：《实验室研究与探索》2022年第6期102-105,共4页Research and Exploration In Laboratory

摘　　要：在商用原子力显微镜的基础上,开发了微纳尺度实时控制教学实验系统。该系统基于“快速原型”的原则进行构建,使用Matlab-xPC Target的宿主机-目标机结构实现实时控制器。通过在宿主机上进行Simulink编程,可以灵活地在目标机中实现自动控制算法,在目标机对原子力显微镜进行实时控制下,完成微纳尺度成像和刻写。该系统不仅有助于提高学生对自动控制原理、计算机控制系统、线性系统理论等课程的学习兴趣,深化对所学理论知识的理解,而且增进了学生对微纳尺度仪器与设备的认识。In order to enrich the practical courses of automatic control course with the micro-and nano-scale experiments,we developed a real-time control experiment system based on the commercial atomic force microscope(AFM)at the micro-and nano-scalefor teaching.By the idea of“rapid prototyping”,the host-target architecture of MatlabxPC Target was used to implement the real-time controller.Through the Simulink programming in the host computer,automatic control methods can be flexibly implemented on the target computer to perform real-time control of the AFM for micro-and nano-scale imaging and manipulation.The experimental system not only helps to improve students’interests in the courses of automatic control theory,computer control system,and linear system theory,but also enhances their understanding formicro-and nano-scale instruments and devices.

关 键 词：原子力显微镜 快速原型 教学实验系统 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]