构建具有中国特色高功率激光系统的洁净控制标准体系  

Establishment of Clean Control Standard System for High Power Laser System with Chinese Characteristics

作　　者：蒋一岚[1] 苗心向[1] 吕海兵[1] Jiang Yilan;Miao Xinxiang;Lv Haibing

机构地区：[1]中国工程物理研究院激光聚变研究中心

出　　处：《洁净与空调技术》2022年第3期1-3,共3页Contamination Control & Air-Conditioning Technology

基　　金：光学表面微纳粒子强激光诱导多相瞬态耦合下的损伤机制研究(61705205)。

摘　　要：对于高功率激光系统来说,其内部的洁净度是激光系统能否高通量稳定运行的关键因素之一。从构建系列洁净标准体系出发,通过以下三种手段建立高功率激光系统洁净控制体系:面对单一样本,提炼全域性洁净问题;关键点突破,带动洁净控制体系化建设;拓展应用,在实践中完善洁净控制标准体系。最终形成了具有我国特色激光系统的“六标”,成功构建了我国激光系统的CCP(洁净控制协议),为我国激光系统的洁净控制迈出了极为关键的第一步。For high-power laser system,its internal cleanliness is one of the key factors for high-throughput and stable operation of the laser system.Starting from the establishment of a series of cleaning standard systems,this paper describes a clean control system for high-power laser systems by the following three means:abstracting the global clean problem with a single sample;Breakthrough in key points to drive the systematic establishment of clean control;Expand the application and perfect the standard system of cleanliness control in practice.Finally,the"six standards"of the laser system with Chinese characteristics have been formed,and the CCP(clean control protocol)of the laser system has been successfully set up,which has taken a very critical first step for the clean control of the laser system in China.

关 键 词：高功率激光系统 标准体系 洁净控制 

分 类 号：TN249[电子电信—物理电子学]