基于单光子雪崩二极管阵列的成像技术研究进展(特邀)  

Research Progress of Imaging Technology Based on Single Photon Avalanche Diode Arrays(Invited)

作　　者：孙鸣捷[1] 王知冠 SUN Mingjie;WANG Zhiguan(School of Instrumentation Science and Opto-electronic Engineering,Beihang University,Beijing 100191,China;Shenyuan Honors College,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191 [2]北京航空航天大学未来空天技术学院/高等理工学院,北京100191

出　　处：《光子学报》2022年第8期182-198,共17页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61922011);国家自然科学基金企业联合基金重点项目(No.U21B2034)。

摘　　要：单光子雪崩二极管以其极高的光子灵敏度以及超快的响应时间在各领域被广泛应用。随着半导体技术的发展,集成多个像素以及时间测量电路的单光子雪崩二极管阵列逐渐普及。成像是一种以光子作为媒介获取目标物体信息的手段,基于单光子雪崩二极管的成像系统可以利用更丰富的光子计数以及光子时间信息实现极端环境下的目标探测。单光子雪崩二极管阵列具备并行采集光子信息的能力,进一步提高了光子信息的探测效率,能够替代传统单光子成像中单点探测器加扫描结构的探测体系,推动生物显微成像、散射成像以及非视域成像等技术的进步。本文梳理了单光子雪崩二极管阵列的发展历程以及技术趋势,按照是否需要光子时间信息分类介绍了单光子雪崩二极管阵列在成像方面的典型应用,结合应用分析了单光子雪崩二极管阵列相比于其他探测器的优势,对单光子雪崩二极管阵列的应用前景进行了展望。Single-photon avalanche diodes are widely used in various fields because of their single-photon sensitivity and excellent time-resolved performance.With the development of semiconductor technology,single-photon avalanche diode arrays integrating multiple pixels and time measurement circuits are gradually popularized,with the ability to collect photon information in parallel.Imaging is a means of obtaining information of the target object through photons,and imaging systems based on single-photon avalanche diodes can use richer photon counts and temporal information to detect the target in extreme environments.Single-photon avalanche diode arrays have higher detection efficiency,which can replace the detection system of single-pixel detectors and scanning structures,promoting the advancement of biological microscopy,scattering imaging and lidar technologies.This manuscript concludes the development of single-photon avalanche diode arrays and introduces some typical applications of singlephoton avalanche diode arrays in imaging.The development of SPAD is similar to other photodetectors,which have gone through the process from single-point detectors to multi-pixel arrays.Because of the application of CMOS technology,SPAD arrays have developed rapidly in terms of pixel scale and circuit integration.Megapixel SPAD arrays with time measurement capabilities are available nowadays.While the pixel scale is gradually increasing,important parameters such as photon detection efficiency,dark count rate,spectral response range,and temporal resolution are also continuously optimized with the development of related technologies.Optical imaging has a long history.With the development of science and technology,people′s research interests have gradually expanded from traditional imaging to imaging under extreme conditions,such as super-resolution imaging,extremely low-light imaging,and over-thehorizon imaging.SPAD has single-photon sensitivity and ps-level temporal resolution,which enables obtaining photon information under extre

关 键 词：单光子雪崩二极管阵列 成像系统 时间相关光子计数技术 生物光子学 散射成像 非视域成像 

分 类 号：TN364[电子电信—物理电子学]