一种六边形结构的电容式微机械超声换能器性能分析  

Performance Analysis of Capacitive Micromachined Ultrasonic Transducer with Hexagonal Structure

作　　者：孟亚楠 何常德[1,2] 党荣 卢小星 张斌珍 张文栋[1,2] Meng Yanan;He Changde;Dang Rong;Lu Xiaoxing;Zhang Binzhen;Zhang Wendong(State Key Laboratory of Dyna mic Measurement Technology,North University of China,Taiyuan 030051,China;Micro and Nano Technology Research Center,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]中北大学微米纳米技术研究中心,太原030051

出　　处：《微纳电子技术》2022年第8期787-794,共8页Micronanoelectronic Technology

基　　金：国家重点研发计划资助项目(2016YFC0105004);国家自然科学基金资助项目(61927807);山西省“1331工程”重点学科建设计划资助项目(1331KSC)。

摘　　要：为满足超声技术领域对宽频带超声换能器的迫切应用需求,研究了一种新型的六边形结构电容式微机械超声换能器(CMUT)。介绍了CMUT的结构参数与工作原理,采用晶圆键合工艺完成了CMUT的制备,对CMUT的电容-电压特性、电导特性、电纳特性、相位特性、阻抗特性与接收灵敏度进行了测试。测试结果表明,该六边形CMUT具备发射与接收超声波的能力,谐振频率随直流偏置电压增大而减小,接收灵敏度可达-225.97 dB(频率1 MHz),且在频率1~10 MHz内一致性较高,变化量为-2.84 dB,显示出其宽频带特性。该研究可为后续二维六边形结构CMUT阵列的优化设计和性能分析提供有力依据。To meet the urgent application demand of broadband ultrasonic transducers in the field of ultrasonic technology, a new capacitive micromachined ultrasonic transducer(CMUT) with hexagonal sructure was studied. The structure parameters and operation principle of the CMUT were introduced. The CMUT was fabricated by using wafer bonding process, and the capacitance-voltage characteristic, conductance characteristic, susceptance characteristic, phase characteristic, impedance characteristic and reception sensitivity of the CMUT were tested. The test results show that the hexagonal CMUT can emit and receive ultrasonic waves, the resonant frequency decreases with the increase of DC bias voltage, the reception sensitivity can reach-225.97 dB(a frequency of 1 MHz), the consistency is high in the frequency range of 1-10 MHz, and the variation is-2.84 dB, showing its broadband characteristics. The study can provide a powerful basis for the optimal design and performance analysis of the subsequent two-dimensional hexagonal CMUT array.

关 键 词：电容式微机械超声换能器(CMUT) 电容特性 阻抗特性 接收灵敏度 六边形结构 

分 类 号：TB552[理学—物理] TH703[理学—声学]