一种基于Au-TiW触点的提高RF MEMS开关寿命的方法  

Method for Improving Lifetime of RF MEMS Switches Based on Au-TiW Contacts

作　　者：朱光州 王志斌 吴倩楠[2,3,4] 李孟委 Zhu Guangzhou;Wang Zhibin;Wu Qiannan;Li Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Center for Microsystem Intergration,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Science,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学微系统集成研究中心,太原030051 [3]中北大学前沿交叉科学研究院,太原030051 [4]中北大学理学院,太原030051

出　　处：《微纳电子技术》2022年第8期801-806,812,共7页Micronanoelectronic Technology

摘　　要：针对基于Au-Au触点的射频微电子机械系统(RF MEMS)开关寿命低的问题,提出了一种高寿命RF MEMS开关的研制方法。对比Au与其他金属的硬度、杨氏模量以及方阻,最终选择性能优良的TiW金属作为新触点材料,其制备参数为溅射功率300 W,气压5 mTorr(1 mTorr=0.133 Pa),溅射时间1 568 s。设计了基于Au-TiW触点的RF MEMS开关工艺流程,给出了详细工艺参数,为进一步提高可靠性,设计了RF MEMS开关封装工艺流程并制作了封装样品。测试比较了基于Au-Au触点的RF MEMS开关与基于Au-TiW触点的RF MEMS开关的寿命与射频性能。结果表明,虽然基于Au-TiW触点的RF MEMS开关的射频性能有所降低,但开关寿命提高了两个数量级。该研究为提高RF MEMS开关的寿命提供了一种解决办法。To solve the problem of low lifetime of radio-frequency(RF) micro-electromechanical system(MEMS) switches based on Au-Au contacts, a development method for high lifetime RF MEMS switches was proposed. The hardness, Young modulus and square resistance were compared between Au and other metals, and the TiW metal with excellent performance was finally selected as the new contact material. The preparation parameters are 300 W sputtering power, 5 mTorr(1 mTorr=0.133 Pa) air pressure and 1 568 s sputtering time. The process of the RF MEMS switch based on Au-TiW contacts was designed and detailed process parameters were given. To further improve reliability, the packaging process of the RF MEMS switch was designed, and the packaging sample was fabricated. The lifetime and RF performance of the RF MEMS switch based on Au-Au contacts and those based on Au-TiW contacts were compared. The results show that although the RF performance of the RF MEMS switch based on Au-TiW contact is reduced, the lifetime is increased by two orders of magnitude. The research provides a method for improving the lifetime of RF MEMS switches.

关 键 词：微电子机械系统(MEMS) 射频(RF)开关 开关寿命 触点材料 可靠性 

分 类 号：TH703[机械工程—仪器科学与技术] TN631[机械工程—精密仪器及机械]