柔性压阻式压力传感器的制备与性能优化  

Preparation and performance optimization of flexible piezoresistive pressure senor

作　　者：汪康 何壮 喻研[1] WANG Kang;HE Zhuang;YU Yan(School of Optics and Electronic Information,Huazhong University of Science and Technology,Wuhan430000,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430000

出　　处：《电子元件与材料》2022年第8期781-793,共13页Electronic Components And Materials

基　　金：国家自然科学基金(51820105008);湖北省自然科学基金面上项目(ZRMS2020001974)。

摘　　要：柔性压力传感器由于具有人体组织一样的柔软性在健康监测、电子皮肤和人机交互等领域扮演重要角色,21世纪物联网技术和人工智能的飞速发展带动了柔性压力传感器的应用热潮,其中柔性压阻式压力传感器因具有结构简单、易于制备、成本低的优点而被广泛使用。为了使柔性压阻式压力传感器能够应用于不同区间下的压力检测,科研人员通过材料选择和结构设计不断优化传感器的性能。本文从材料选择、制备方法和性能优化几个方面综述了近几年柔性压阻式压力传感器的发展动态,并从实际应用的角度出发对未来传感器的发展方向作出展望。Flexible pressure sensors play an pivotal role in health monitoring,electronic skin and human-computer interaction due to their similar flexibility as the human tissue.Further,the rapid development of Internet of Things technology and artificial intelligence in the 21 st century has led to a boom in the application of flexible pressure sensors.Many principles have been used to detect pressure signals.Among them,piezoresistive pressure sensors have been widely used due to their simple structure,easy preparation and low cost.To enable their detection under different pressure,researchers have been continuously optimizing the performance of pressure sensor by material selection and structural design.This paper reviews the development status of flexible piezoresistive pressure sensors in recent years from material selection,preparation method and performance optimization.Finally,the future development directions are prospected for flexible piezoresistive pressure sensors from the perspective of practical application.

关 键 词：柔性压阻式压力传感器 制备 综述 性能优化 展望 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]