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作 者:陆杨丹 吕建国[1] 杨汝琪 陆波静 朱丽萍[1] 叶志镇[1] Lu Yang-Dan;Lü Jian-Guo;Yang Ru-Qi;Lu Bo-Jing;Zhu Li-Ping;Ye Zhi-Zhen(State Key Laboratory of Silicon Materials,School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China)
机构地区:[1]浙江大学材料科学与工程学院,硅材料国家重点实验室,杭州310027
出 处:《物理学报》2022年第18期322-329,共8页Acta Physica Sinica
基 金:浙江省重点研发计划(批准号:2021C01030);浙江省尖兵领雁计划(批准号:2021C01SA301612)资助的课题。
摘 要:为获得更优性能的无铟透明导电薄膜,需要在不损害薄膜透光性的同时提高导电性能.本文采用紫外光刻和磁控溅射,在Cu网格的表面覆盖Al掺杂的ZnO(ZnO:Al,AZO)薄膜,制备透明导电的AZO/Cu网格复合膜.Cu网格的线宽低至15μm,透光性极高,并且导电性能得到大幅度改善,覆盖稳定的透明导电AZO薄膜为Cu网格提供屏障保护.通过六边形网格形状的设计和工艺参数的优化,制备出的复合膜的可见光波段透过率达到86.4%,方块电阻降低至4.9Ω/sq,同时实现了高透光性和高导电性.成本低廉、光电性能好且环境稳定的AZO/Cu网格复合膜在透明电子领域具有广泛的应用前景,将其用于透明电加热膜,可在较低电压下实现快速、均匀、稳定的电热响应,有望作为透明的面发热膜应用于除雾除霜玻璃、热疗贴膜等.Transparent conductive films(TCFs)play an indispensable role in optoelectronic devices because of their high conductivity and high optical transmittance.In order to obtain indium-free transparent conductive films with better performance,we need to improve the conductivity,while not damaging the transmittance.Metal mesh is highly conductive but prone to oxidation and abrasion,while transparent conductive oxide(TCO)is stable but less conductive.Thus,we composite the metal mesh with the stable TCO to achieve complementary advantages.In this work,we fabricate a hexagonal Cu mesh and then cover the Cu mesh with Al-doped ZnO(AZO)film by using lithography and magnetron sputtering.The line width and length of mesh are 15μm and150μm,respectively,which are not visible to the naked eye.The effect of AZO growth temperature on the properties of such AZO/Cu mesh composite film is studied and the optimal temperature is 300℃.By designing the mesh and optimizing the process,the transmittance(400–800 nm),sheet resistance and FoM of AZO/Cu mesh composite film reach 86.4%,4.9Ω/sq and 4.73×10^(-2)Ω^(-1),respectively,thus possessing both transparent and conductive property.Because of its low cost,competitive optoelectronic performance and stability,the potential applications of AZO/Cu mesh composite film in transparent electronics are fantastic.When used as a transparent conductor to connect LED to 3 V DC power,the luminance of LED in series with AZO/Cu mesh composite film is lighter than that of AZO film and Cu mesh.According to the Ohmic heating effect of electric current passing through a conductor,AZO/Cu mesh composite film can be designed as electric heating film.At low voltage safe for human body,AZO/Cu mesh composite film can implement fast,uniform and stabile heat.In the cyclic electric heating test,the AZO/Cu mesh composite film can be heated rapidly to 175℃all the time,showing a fast temperature response and stable cyclic performance.More importantly,the AZO is itself transparent and conductive and prevents the me
分 类 号:TB383.2[一般工业技术—材料科学与工程]
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